Research on MEMS-SAW gyroscope

LI Quan-xi1; YIN Bing2

doi:10.13873/j.1000-97872010.11.013

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Research on MEMS-SAW gyroscope

更新时间：2025-09-11

- Research on MEMS-SAW gyroscope
- Vol. 29, Issue 11, Pages: 61-63+66(2010)
- 作者机构：
  
  1. 河南理工大学计算机科学与技术学院
  2. 河南理工大学电气工程与自动化学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872010.11.013
  CLC： TN65
- Published：2010
- 稿件说明：
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[1]李泉溪,银兵.MEMS-SAW陀螺仪研究[J].传感器与微系统,2010,29(11):61-63+66.

LI Quan-xi1, YIN Bing2. Research on MEMS-SAW gyroscope[J]. 2010, 29(11): 61-63+66.
[1]李泉溪,银兵.MEMS-SAW陀螺仪研究[J].传感器与微系统,2010,29(11):61-63+66. DOI： 10.13873/j.1000-97872010.11.013.

LI Quan-xi1, YIN Bing2. Research on MEMS-SAW gyroscope[J]. 2010, 29(11): 61-63+66. DOI： 10.13873/j.1000-97872010.11.013.

摘要

采用耦合模（COM）理论对声表面波（SAW）谐振器进行数字模拟

并采用梅森（Mason）正交场模型对陀螺仪和传感器进行模拟设计

最后对SAW谐振器和SAW传感器进行实验评价。这种陀螺仪具有额外的能力

可以作为无线陀螺仪和集成在SAW加速度传感器上。

Abstract

Digital simulation of SAW resonators is carried up using COM theory

and Mason orthogonal-field model is used to simulate the gyroscopes and sensors design.Experimental evaluation of SAW resonators and SAW sensors is made.This gyroscope has additional capabilities which can be used as wireless gyroscopes and integrated in SAW acceleration sensors.

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references

基于声表面波技术探测微量气体的理论分析 [J]. 李淑红,赵启大,廖同庆,廖纪平. 传感器与微系统 . 2008(08)

微机械叉指换能器声表面波陀螺 [J]. 马晋毅. 压电与声光 . 2003(06)

MEMS-IDT声表面波陀螺 [J]. 吕志清,胡爱民. 微纳电子技术 . 2003(04)

电容式微机械陀螺设计[M]. 国防工业出版社 , 李锦明, 2006

MEMS技术及其应用[M]. 哈尔滨工业大学出版社 , 李德胜等编著, 2002

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