Design and performance study on nano-silicon thin-film ultraminiatured pressure sensor

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- Design and performance study on nano-silicon thin-film ultraminiatured pressure sensor
- Vol. 29, Issue 10, Pages: 62-64(2010)
- 作者机构：
  
  1. 江苏大学微纳米研究中心
  2. 江苏工业学院低维材料微纳器件与系统中心
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872010.10.030
  CLC： TP212.1
- Published：2010
- 稿件说明：
移动端阅览
[1]沈思国,丁建宁,潘海彬,凌智勇,程广贵,范真.纳米硅薄膜超微压力传感器设计与性能研究[J].传感器与微系统,2010,29(10):62-64.

SHEN Si-guo1, DING Jian-ning1, PAN Hai-bin1, et al. Design and performance study on nano-silicon thin-film ultraminiatured pressure sensor[J]. 2010, 29(10): 62-64.
[1]沈思国,丁建宁,潘海彬,凌智勇,程广贵,范真.纳米硅薄膜超微压力传感器设计与性能研究[J].传感器与微系统,2010,29(10):62-64. DOI： 10.13873/j.1000-97872010.10.030.

SHEN Si-guo1, DING Jian-ning1, PAN Hai-bin1, et al. Design and performance study on nano-silicon thin-film ultraminiatured pressure sensor[J]. 2010, 29(10): 62-64. DOI： 10.13873/j.1000-97872010.10.030.

利用纳米硅薄膜良好的力学与电学特性

设计出超微压压力传感器芯片结构:双岛—梁—膜结构。利用ANSYS进行了静力分析、模态分析、谐反应分析、瞬态分析

结果表明:该结构具有灵敏度高、线性度好、动态响应快等优点。

Utilizing good mechanical and electrical properties of nano-silicon thin-film

a chip structure double island-beam-membrane structure of the ultraminiatured pressure sensor was designed.Static analysis

modal analysis

harmonic response analysis and transient analysis were carried out by means of ANSYS

the results show that this structure has advantages of high sensitivity

good linearity

fast dynamic response and so on.

基于MEMS技术的超微压压力传感器研究进展 [J]. 薛伟,王权,丁建宁,杨继昌. 农业机械学报 . 2006(03)

高温压力传感器温度漂移补偿研究 [J]. 王权,丁建宁,王文襄,范真. 传感器技术 . 2005(02)

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