Optimal design of SAW gas sensor using two-port resonator

LI Kun; DU Xiao-song; HU Jia; SUN Ping; JIANG Ya-dong

doi:10.13873/j.1000-97872010.09.027

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Optimal design of SAW gas sensor using two-port resonator

更新时间：2025-09-11

- Optimal design of SAW gas sensor using two-port resonator
- Vol. 29, Issue 9, Pages: 97-100(2010)
- 作者机构：
  
  电子科技大学光电信息学院电子薄膜与集成器件国家重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872010.09.027
  CLC： TP212
- Published：2010
- 稿件说明：
移动端阅览
[1]李琨,杜晓松,胡佳,孙萍,蒋亚东.双端谐振型SAW气体传感器的优化设计[J].传感器与微系统,2010,29(09):97-100.

LI Kun, DU Xiao-song, HU Jia, et al. Optimal design of SAW gas sensor using two-port resonator[J]. 2010, 29(9): 97-100.
[1]李琨,杜晓松,胡佳,孙萍,蒋亚东.双端谐振型SAW气体传感器的优化设计[J].传感器与微系统,2010,29(09):97-100. DOI： 10.13873/j.1000-97872010.09.027.

LI Kun, DU Xiao-song, HU Jia, et al. Optimal design of SAW gas sensor using two-port resonator[J]. 2010, 29(9): 97-100. DOI： 10.13873/j.1000-97872010.09.027.

摘要

针对FPOL敏感膜ST切石英基底双端谐振型SAW传感器的频率响应特性和敏感机理进行了理论分析。采用P矩阵级联方法与微扰理论

系统地讨论了影响传感器频率响应特性与探测灵敏度的因素。研究结果表明:在优化设计传感器器件结构的基础上

还需合理选择敏感区宽度、敏感膜材料特性及厚度

以提高探测灵敏度、降低插入损耗。给出了优化后的器件结构和敏感膜参数

可对双端谐振型SAW传感器的设计与性能分析提供重要参考。

Abstract

The frequency response characteristics and the sensitive mechanism of the ST cut quartz based SAW sensor with two-port resonator and FPOL sensitive film were theoretically analyzed.The factors which affect the frequency response and the detective sensitivity were systematically discussed by P-matrix method and the perturbation theory.Conclusion can be drawn that it is necessary to properly choose the width

the thickness and the material characteristics of the sensitive film in order to improve the detective sensitivity and to decrease the insert loss.The optimized device struture and sensitive film parameters were given

which can provide important reference in design and characteristics analyzsis of the SAW gas sensor using two-port resonator.

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references

声表面波气体传感器化学敏感膜研究进展 [J]. 骆国芳,吕晖,曹丙庆,赵建军,潘勇. 分析仪器 . 2007(03)

SAW传感器对神经性毒剂及模拟剂的检测进展 [J]. 王华,杜晓松,蒋亚东,谢光忠,应智花,何为. 传感器与微系统 . 2007(04)

Theoretical analysis on response mechanism of polymer-coated chemical sensor based Love wave in viscoelastic media [J] . Wen Wang,Shitang He. Sensors & Actuators: B. Chemical . 2009 (2)

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