Research on performance improvement on nano-ZnO gas sensor using microwave sintering

DING Hong1; BAI Zi-kui2

doi:10.13873/j.1000-97872010.09.023

Chinese

您当前的位置：

首页 >

文章列表页 >

Research on performance improvement on nano-ZnO gas sensor using microwave sintering

更新时间：2025-09-11

- Research on performance improvement on nano-ZnO gas sensor using microwave sintering
- Vol. 29, Issue 9, Pages: 74-76(2010)
- 作者机构：
  
  1. 上海第二工业大学计算机学院
  2. 华中科技大学材料学院塑性成型及模具技术国家重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872010.09.023
  CLC： TP212.9
- Published：2010
- 稿件说明：
移动端阅览
[1]丁红,柏自奎.微波烧结对纳米ZnO气敏元件性能改进研究[J].传感器与微系统,2010,29(09):74-76.

DING Hong1, BAI Zi-kui2. Research on performance improvement on nano-ZnO gas sensor using microwave sintering[J]. 2010, 29(9): 74-76.
[1]丁红,柏自奎.微波烧结对纳米ZnO气敏元件性能改进研究[J].传感器与微系统,2010,29(09):74-76. DOI： 10.13873/j.1000-97872010.09.023.

DING Hong1, BAI Zi-kui2. Research on performance improvement on nano-ZnO gas sensor using microwave sintering[J]. 2010, 29(9): 74-76. DOI： 10.13873/j.1000-97872010.09.023.

摘要

分析了微波烧结的原理和特点

并将其引入气敏元件的制备工艺中

研究微波烧结工艺对纯纳米ZnO厚膜阵列元件的气敏性和稳定性的影响。实验表明:微波烧结ZnO厚膜时间越长

厚膜电导和敏感性越小。在20

60 min 3种烧结对比中

20 min烧结的元件具有最好的敏感性和最低的最佳敏感温度

60 min烧结的元件具有最好的稳定性。可见微波烧结可以有效调控气敏元件的敏感性和稳定性

是一种值得推广的新的气敏元件的制备技术。

Abstract

Microwave sintering technique was employed to study the gas-sensing property and stability of single doped ZnO sensor arrays after analyzing the principles and characteristics of microwave sintering.The experimental results show that the longer the ZnO and doped ZnO thick films are sintered

the lower the sensor conductivity and sensitivity are.The sensor sintered by microwave for 20 minutes have the highest sensitivity and lowest temperature for optimized sensitivity.Those sensor sintered for 60 minutes have the best stability.Microwave sintering technique can effectively modify and control sensibility and stability of gas sensor.It is worth further promotion.

关键词

Keywords

references

激光烧结纳米ZnO气敏传感器制备及其气敏特性研究 [J]. 王林,张覃轶,祝柏林,王爱华,谢长生. 传感技术学报 . 2003(04)

Views

118

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

High stability SO₂ gas sensor based on LaFeO₃-V₂O₅ composite material

MEMS SOI high temperature pressure sensor chip

Optimal design of Σ-Δ MEMS accelerometer based on multi-objective genetic algorithm

Target tracking algorithm combines STC with CamShift

Research on stability of polarographic dissolved oxygen sensor

Related Author

ZHANG Yuhong

ZHANG Shunping

ZHANG Qinyi

ZHU Xiaomeng

CAO Zhanrong

WU Zuo-fei

TIAN Lei

TAO Mao-jun

Related Institution

Guangdong Tuobituo Technology Co Ltd

School of Materials Science and Engineering, Huazhong University of Science and Technology

School of Materials Science and Engineering, Wuhan University of Technology

The 49th Research Institute of China Electronics Technology Group Corporation

Control System Institute of Aero Engine Corporation of China

⁰