A novel low voltage actuated valveless micropump is presented.The PMMA is used to fabricate the cavity

and the structure of diffuser and nozzle is adopted in the micropump.The micro-vibration motor is used as the actuator

and the flexible polydimethylsiloxane（PDMS）is used as the vibration membrane.The best size of the diffuser and nozzle is obtained by means of finite element analysis method.The vibration frequency and the flow rate of the micropump are measured

and the result shows that the voltage have significant influence on them.When the voltage ranges between 1.0

1

.8 V

the flow rate has significant increase;but when the voltage changes between 1.8

3

.3 V

the flow rate has small change.The maximum flow rate is 150 μL/min.The valveless micropump has simple structure

low

driving voltage

low cost and good performance.