Limiting current type of oxygen sensor with co-fired ceramic technology

ZHOU Ming-jun; CHENG Ying-guo; LI Hui-ying; LI Kai; WU Qiang

doi:10.13873/j.1000-97872010.08.039

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Limiting current type of oxygen sensor with co-fired ceramic technology

更新时间：2025-09-11

- Limiting current type of oxygen sensor with co-fired ceramic technology
- Vol. 29, Issue 8, Pages: 97-99(2010)
- 作者机构：
  
  中国电子科技集团公司第四十九研究所
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872010.08.039
  CLC： TP212.2
- Published：2010
- 稿件说明：
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[1]周明军,程迎国,李慧颖,李凯,武强.陶瓷共烧结极限电流氧气传感器[J].传感器与微系统,2010,29(08):97-99.

ZHOU Ming-jun, CHENG Ying-guo, LI Hui-ying, et al. Limiting current type of oxygen sensor with co-fired ceramic technology[J]. 2010, 29(8): 97-99.
[1]周明军,程迎国,李慧颖,李凯,武强.陶瓷共烧结极限电流氧气传感器[J].传感器与微系统,2010,29(08):97-99. DOI： 10.13873/j.1000-97872010.08.039.

ZHOU Ming-jun, CHENG Ying-guo, LI Hui-ying, et al. Limiting current type of oxygen sensor with co-fired ceramic technology[J]. 2010, 29(8): 97-99. DOI： 10.13873/j.1000-97872010.08.039.

摘要

利用陶瓷共烧结技术研制了一种极限电流氧气传感器。这种传感器为一体式结构

制作工艺与传统工艺相比

无需玻璃封接工艺

就能实现良好的性能

提高了产品的可靠性

并大大降低了制作成本。所制得的传感器敏感芯体尺寸为4mm×7 mm

厚度仅为0.4 mm

并形成一个厚度约为50μm的内腔室

扩散孔直径约10μm。传感器性能通过实验验证

功耗可以达到1.8 W以下

能够测量体积分数为0%～90%的氧气

响应时间低于10 s

测量误差在0.8%以内。

Abstract

Co-fired ceramic technology was used to develop a kind of limiting current type of oxygen sensor.Compared with traditional technology

it doesn’t need glass sealing process.The limiting current type of oxygen sensor has the advantages of high reliability as well as low cost.The size of the sensitive chip was 4mm×7mm

whereas the thickness was only 0.4mm.Furthermore

the height of the air-tight inner cavity was 50μm

while the diameter of diffusion hole was 10μm.According to the experiments verification

power consumption of this oxygen sensor was even lower than 1.8W.The volume fraction oxygen test range was 0%

0%;the response time was within 10s and the measuring error is within 0.8%.

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