Study on gas sensing optical properties of SnO<sub>2</sub>:Ti thin film prepared by sol-gel

FENG Jin-yuan; DENG Jian-qiang; KONG Zhen

doi:10.13873/j.1000-97872010.08.007

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Study on gas sensing optical properties of SnO₂:Ti thin film prepared by sol-gel

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- Study on gas sensing optical properties of SnO₂:Ti thin film prepared by sol-gel
- Vol. 29, Issue 8, Pages: 68-70(2010)
- 作者机构：
  
  华南理工大学理学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872010.08.007
  CLC： O484.41
- Published：2010
- 稿件说明：
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[1]冯金垣,邓健强,孔镇.溶胶—凝胶法掺钛SnO_2薄膜的气敏光学特性研究[J].传感器与微系统,2010,29(08):68-70.

FENG Jin-yuan, DENG Jian-qiang, KONG Zhen. Study on gas sensing optical properties of SnO₂:Ti thin film prepared by sol-gel[J]. 2010, 29(8): 68-70.
[1]冯金垣,邓健强,孔镇.溶胶—凝胶法掺钛SnO_2薄膜的气敏光学特性研究[J].传感器与微系统,2010,29(08):68-70. DOI： 10.13873/j.1000-97872010.08.007.

FENG Jin-yuan, DENG Jian-qiang, KONG Zhen. Study on gas sensing optical properties of SnO₂:Ti thin film prepared by sol-gel[J]. 2010, 29(8): 68-70. DOI： 10.13873/j.1000-97872010.08.007.

摘要

采用溶胶—凝胶法在玻璃基片上制备掺钛SnO2薄膜

对不同掺杂浓度的薄膜进行XRD测试。在常温下对膜片在乙醇气氛中进行气敏光学特性测试。结果表明:掺钛薄膜在常温下对测试气体的反应时间比其他掺杂薄膜明显缩短

并且薄膜的灵敏度与掺杂浓度有关

10%掺钛SnO2薄膜的灵敏度在1800～2 500 nm波长范围保持在15%左右。

Abstract

SnO2 ∶Ti thin film of different doping concentrations are prepared by sol-gel and tested by XRD.The gas sensing optical properties of the film in the ethanol are researched at the room temperature.The experimental result shows that response time of SnO2 ∶Ti thin film is significantly shorter than the other at the room temperature and is related to doping concentrations.Sensitivity of 10% SnO2 ∶Ti film at the range of 1800

500nm wavelength remained at 15%.

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references

磁控射频溅射Cu掺杂SnO 2 薄膜的气敏光学特性研究 [J]. 冯金垣,郝延华. 陶瓷学报 . 2008(03)

CuO掺杂纳米SnO 2 的气敏性能研究 [J]. 王晓兵,寇玉鹏,梁慧君,赵晓华,娄向东. 电子元件与材料 . 2008(02)

用Sol-Gel法制备气敏传感器SnO 2 薄膜的研究 [J]. 秦友兰,王万录,赵作峰,肖金龙,董玉峰. 广西师范大学学报(自然科学版) . 2000(03)

汽相沉积法SnO 2 薄膜光谱透过率气敏特性的研究 [J]. 冯金垣,越泽庭,黎达宇,杨日福. 光学技术 . 1998(04)

催化剂对氧化物气敏性能的影响 [J]. 朱文会,徐甲强. 郑州轻工业学院学报 . 1994(S1)

气敏传感器今后的研究课题 [J]. 蔡可芬. 传感器技术 . 1990(06)

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Study on gas sensing optical properties of SnO2:Ti thin film prepared by sol-gel

DOI：10.13873/j.1000-97872010.08.007

摘要

Abstract

关键词

Keywords

references

Study on gas sensing optical properties of SnO₂:Ti thin film prepared by sol-gel