Study on gas detection based on laser ultrasound surface wave detection

FU Hua; QIAO De-hao; CHI Ji-hui

doi:10.13873/j.1000-97872010.07.041

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Study on gas detection based on laser ultrasound surface wave detection

更新时间：2025-09-11

- Study on gas detection based on laser ultrasound surface wave detection
- Vol. 29, Issue 7, Pages: 50-52(2010)
- 作者机构：
  
  辽宁工程技术大学电气与控制工程学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872010.07.041
  CLC： TP274.53
- Published：2010
- 稿件说明：
移动端阅览
[1]付华,乔德浩,池继辉.基于激光超声表面波检测的瓦斯检测研究[J].传感器与微系统,2010,29(07):50-52.

FU Hua, QIAO De-hao, CHI Ji-hui. Study on gas detection based on laser ultrasound surface wave detection[J]. 2010, 29(7): 50-52.
[1]付华,乔德浩,池继辉.基于激光超声表面波检测的瓦斯检测研究[J].传感器与微系统,2010,29(07):50-52. DOI： 10.13873/j.1000-97872010.07.041.

FU Hua, QIAO De-hao, CHI Ji-hui. Study on gas detection based on laser ultrasound surface wave detection[J]. 2010, 29(7): 50-52. DOI： 10.13873/j.1000-97872010.07.041.

摘要

利用SnO2/Pt气敏薄膜对瓦斯气体的选择性吸附作用将引起声表面波在其表面的传播速度发生相应改变的性质

并结合激光超声检测技术

提出了一种新的瓦斯检测方法。采用激光在覆有选择性气体吸附薄膜的抛光铝材表面激发出声表面波

用单芯光纤耦合的反射式光束偏转法对所激发声表面波信息进行采集

进而通过合理的算法可以准确检测出环境中瓦斯气体的体积分数。为瓦斯监测方法提供了一种新途径。

Abstract

The property of air sensitive of SnO2/Pt film that gas adsorption effect will cause the velocity corresponding change of surface acoustic wave on the film surface.Combined with laser ultrasound detection technology

a new kind of gas sensor detection methods is put forward.By using the laser cladding selective adsorption film on the surface of polishing aluminum

to inspire acoustic surface wave and by using single fiber coupling beams of reflective deflection method

the stimulated surface acoustic wave information is acquired.By using reasonable algorithm.the gas volume fraction in the environment can be accurately detected.It provides a new way for gas monitoring method.

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references

声表面波气体传感器的研究进展 [J]. 杨楷,李志刚,景玉鹏,陈大鹏. 电子元件与材料 . 2008(09)

基于激光激发声表面波新型气体传感器的研究 [J]. 姜超,刘光达. 光电工程 . 2007(04)

低功耗甲烷气敏元件的制备及气敏性能研究 [J]. 祁明锋,杜为民,王利利,薛西军. 计测技术 . 2006(S1)

声表面波气体传感器技术 [J]. 王利敏. 舰船科学技术 . 2006(02)

激光激发声表面波及其用于表面缺陷检测的实验研究 [D]. 严刚. 南京理工大学 2004

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