Application of laser displacement sensor in measurement of angle

ZHU Wan-bin1; ZHONG Jun1; MO Ren-yun1

doi:10.13873/j.1000-97872010.06.041

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Application of laser displacement sensor in measurement of angle

更新时间：2025-09-11

- Application of laser displacement sensor in measurement of angle
- Vol. 29, Issue 6, Pages: 131-133(2010)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所应用光学重点实验室
  2. 中国科学院研究生院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872010.06.041
  CLC： TP212.14;TH712
- Published：2010
- 稿件说明：
移动端阅览
[1]朱万彬,钟俊,莫仁芸.激光位移传感器在角度测量中的应用[J].传感器与微系统,2010,29(06):131-133.

ZHU Wan-bin1, ZHONG Jun1, MO Ren-yun1. Application of laser displacement sensor in measurement of angle[J]. 2010, 29(6): 131-133.
[1]朱万彬,钟俊,莫仁芸.激光位移传感器在角度测量中的应用[J].传感器与微系统,2010,29(06):131-133. DOI： 10.13873/j.1000-97872010.06.041.

ZHU Wan-bin1, ZHONG Jun1, MO Ren-yun1. Application of laser displacement sensor in measurement of angle[J]. 2010, 29(6): 131-133. DOI： 10.13873/j.1000-97872010.06.041.

摘要

激光位移传感器因其较高的测量精度和非接触测量特性

可应用在很多方面

将其用在测量工件的角度上能够实现角度的高精度测量。通过步进电机带动激光位移传感器扫描二面角的2个面

然后对测量的数据采用Matlab程序做最小二乘拟合

得到二面角两边的斜率

从而求出角度。实验中采用的位移传感器分辨率为0.3μm

导轨和步进电机重复定位精度高于3μm

则测量角度的精度高于1″。

Abstract

Laser displacement sensor can be used in many areas because of its high precision and non-contact measuring characteristics.It is used in measurement of angle of the workpiece and can achieved high-precision angle measurement.The laser displacement sensor stepper motor is drived by scan dihedral angle of the workpiece.Least-squares fitting is carried out by Matlab to get the slope of the angle

then the angle is equated.The resolution of displacement sensor used in the experiment is 0.3 μm

the repetition localization precision of rail and stepper motors is 3 μm

the precision of measuring angles is higher than 1″.

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Keywords

references

一种改进型高精度激光三角位移传感器的结构设计研究 [J]. 曹红超,陈磊,王波,朱万彬. 激光杂志 . 2007(06)

基于PSD的高精度激光位移传感器设计与分析 [J]. 蔡明知,宋洪侠,曹铁泽,王晓东. 机电产品开发与创新 . 2007(05)

高精度步进电机控制方法 [J]. 杨绍岩,黄立创,刘丽. 光电技术应用 . 2006(01)

中国角度计量50年的进展 [J]. 陆德基,范天泉. 计量与测试技术 . 1999(06)

误差理论与数据处理[M]. 机械工业出版社 , 费业泰主编, 1987

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