Design of constant temperature laboratory casework for soft lithography

YANG Jun; LIU Lin-lin; CHEN Mo; ZHENG Xiao-lin; GONG Zhao-tao

doi:10.13873/j.1000-97872010.06.012

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Design of constant temperature laboratory casework for soft lithography

更新时间：2025-09-11

- Design of constant temperature laboratory casework for soft lithography
- Vol. 29, Issue 6, Pages: 108-111(2010)
- 作者机构：
  
  1. 重庆大学生物工程学院生物流变科学与技术教育部重点实验室
  2. 重庆金山(科技)集团有限公司
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872010.06.012
  CLC： TN305.7
- Published：2010
- 稿件说明：
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[1]杨军,刘琳琳,陈默,郑小林,宫兆涛.用于软光刻的恒温实验台的设计[J].传感器与微系统,2010,29(06):108-111.

YANG Jun, LIU Lin-lin, CHEN Mo, et al. Design of constant temperature laboratory casework for soft lithography[J]. 2010, 29(6): 108-111.
[1]杨军,刘琳琳,陈默,郑小林,宫兆涛.用于软光刻的恒温实验台的设计[J].传感器与微系统,2010,29(06):108-111. DOI： 10.13873/j.1000-97872010.06.012.

YANG Jun, LIU Lin-lin, CHEN Mo, et al. Design of constant temperature laboratory casework for soft lithography[J]. 2010, 29(6): 108-111. DOI： 10.13873/j.1000-97872010.06.012.

摘要

介绍了一种可用于软光刻操作的恒温实验台的设计与实现。在一个密闭的小型箱体中集成了温度与压力控制、照明及紫外光照、操作手套等组件

可以实现无尘、恒温、压力可控、紫外光照等多种功能。在该恒温实验台中

利用聚二甲基硅氧烷进行微传递模塑实验研究

考察了温度、压力等对聚二甲基硅氧烷成模特性的影响。同时

还利用聚二甲基硅氧烷与聚亚胺脂的两次复制完成了硅微芯片结构向玻璃基底的转移。研究结果表明:这一新的实验研究平台可以实现恒温、无尘操作、一定的真空度以及紫外照射

满足普通实验室进行微传递模塑等软光刻操作的要求。

Abstract

A constant temperature laboratory casework is designed for soft-lithography manipulation.Several components such as temperature and pressure control modules

general and ultraviolet illuminating modules

and manipulation gloves are integrated within a small airtight box to realize multiple functions.PDMS based micro-transfer modeling method has been studied on this laboratory casework

and the influence of temperature

pressure on the modeling characteristics is also explored.Meanwhile

micro-structures on silicon microchip is transferred to glass substrate by using twice replication of PDMS and PU.Experimental results validate that this new laboratory casework can achieve constant temperature

cleaning manipulation

certain vacuum

and ultraviolet illumination.It is suitable for the soft-lithography manipulation in common laboratory.

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references

硅微通道红细胞变形性测量系统的实用化研究 [J]. 郑小林,常婧,廖彦剑,杨军,刘畅. 传感器与微系统 . 2009(07)

Microfabrication process for patterning metallic lithium encapsulated electrodes [J] . Sami Oukassi,Nicolas Dunoyer,Raphael Salot,Steve Martin. Applied Surface Science . 2009 (3)

Preparation of orthogonally functionalized surface using micromolding in capillaries technique for the control of cellular adhesion [J] . Ji-Hye Lee,Hye-Eun Kim,Jeong Hyuk Im,Yun Mi Bae,Joon Sig Choi,Kang Moo Huh,Chang-Soo Lee. Colloids and Surfaces B: Biointerfaces . 2008 (1)

Polymer microfabrication technologies for microfluidic systems [J] . Analytical and Bioanalytical Chemistry . 2008 (1)

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