Study on 3D bio-stimulating microelectrode array based on flexible substrate

ZHOU Ran; CHEN Di; HUANG Chuang; CHEN Xiang; LIU Jing-quan; ZHU Jun

doi:10.13873/j.1000-97872010.05.043

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Study on 3D bio-stimulating microelectrode array based on flexible substrate

更新时间：2025-09-11

- Study on 3D bio-stimulating microelectrode array based on flexible substrate
- Vol. 29, Issue 5, Pages: 134-136(2010)
- 作者机构：
  
  上海交通大学微米/纳米加工技术国家级重点实验室薄膜与微细技术教育部重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872010.05.043
  CLC： TP211.4
- Published：2010
- 稿件说明：
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[1]周然,陈迪,黄闯,陈翔,刘景全,朱军.基于柔性衬底的三维生物刺激微电极阵列研究[J].传感器与微系统,2010,29(05):134-136.

ZHOU Ran, CHEN Di, HUANG Chuang, et al. Study on 3D bio-stimulating microelectrode array based on flexible substrate[J]. 2010, 29(5): 134-136.
[1]周然,陈迪,黄闯,陈翔,刘景全,朱军.基于柔性衬底的三维生物刺激微电极阵列研究[J].传感器与微系统,2010,29(05):134-136. DOI： 10.13873/j.1000-97872010.05.043.

ZHOU Ran, CHEN Di, HUANG Chuang, et al. Study on 3D bio-stimulating microelectrode array based on flexible substrate[J]. 2010, 29(5): 134-136. DOI： 10.13873/j.1000-97872010.05.043.

摘要

设计了一种基于聚酰亚胺薄膜的三维生物刺激微电极阵列

用于植入式人造视网膜应用。采用非硅MEMS技术

在柔性衬底上制备出具有生物相容性和化学稳定性

电极高度为80μm的生物刺激电极阵列

通过PDMS牺牲层实现器件从基底的完整释放。实验中器件以聚酰亚胺和PDMS封装

电极柱和焊盘均镀金

从而提高电极的生物相容性。采用三电极法对微电极进行了电化学性能测试

在10-1～105Hz频率范围内

其阻抗为1.5～0.3 kΩ。制造出的器件尺寸小

质量轻

可靠性高

机械柔性好

符合生物电刺激要求。

Abstract

A novel 3D bio-stimulating microelectrode array was designed based on polyimide thin film for implantable artificial retina.Non-silicon MEMS technique was applied o fabricate the flexible microelectrode with the height of 80 μm

which is also bio-compatible and chemical stable.The microelectrode was then released from substrate by PDMS sacrificial layer process and packaged by polyimide and PDMS.Au was eletroplated on the surface of electrodes and pads to obtain bio-compatibility.The electrochemical properties of electrodes was detected by three-electrode method

and the impedance varied at the range of 1.5～0.3 kΩ and at the frequency 10-1～105 Hz.With the advantages of small size

light weight

high reliability and flexibility

the device is suitable for bio-stimulation.

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references

粗糙表面精度测量系统的研究 [J]. 高春甫,邬敏. 光学精密工程 . 2005(06)

RETINAL PROSTHESIS [J] . James D. Weiland,Wentai Liu,Mark S. Humayun. Annual Review of Biomedical Engineering . 2005

Formation of metal–polymer interfaces by metal evaporation: influence of deposition parameters and defects [J] . V Zaporojtchenko,T Strunskus,K Behnke,C.v Bechtolsheim,A Thran,F Faupel. Microelectronic Engineering . 2000 (1)

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