Tensile test system of thin-film material based on  virtual instruments

XING Xing; ZHU Yu-tian; WU Qiang; HUANG Hai-tao

doi:10.13873/j.1000-97872010.04.042

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Tensile test system of thin-film material based on virtual instruments

更新时间：2025-09-11

- Tensile test system of thin-film material based on virtual instruments
- Vol. 29, Issue 4, Pages: 134-136(2010)
- 作者机构：
  
  同济大学机械工程学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872010.04.042
  CLC： TP274
- Published：2010
- 稿件说明：
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[1]邢星,朱玉田,吴强,黄海涛.基于虚拟仪器的薄膜材料拉伸测试系统[J].传感器与微系统,2010,29(04):134-136.

XING Xing, ZHU Yu-tian, WU Qiang, et al. Tensile test system of thin-film material based on virtual instruments[J]. 2010, 29(4): 134-136.
[1]邢星,朱玉田,吴强,黄海涛.基于虚拟仪器的薄膜材料拉伸测试系统[J].传感器与微系统,2010,29(04):134-136. DOI： 10.13873/j.1000-97872010.04.042.

XING Xing, ZHU Yu-tian, WU Qiang, et al. Tensile test system of thin-film material based on virtual instruments[J]. 2010, 29(4): 134-136. DOI： 10.13873/j.1000-97872010.04.042.

摘要

光致弯曲薄膜材料在微机电系统中有着巨大的应用前景

而材料基本物理参数的测试是重要的基础性工作。鉴于现有的薄膜材料拉伸测试机不能满足微尺度条件下的测试需要或者较为昂贵

设计出一种薄膜材料拉伸测试系统

能够精确均匀加载

并运用LabVIEW编程设计出拉伸测试虚拟仪器

实现数据采集、分析、处理和存储

以及控制信号输出。该系统具有分辨率高的优点

位移分辨率和力分辨率分别可达1μm和1mN

满足了微小尺度薄膜试验的需要。

Abstract

Light-induced thin-film materials have great potential value in micro-electro-mechanical-system（MEMS） and tests of the basic physical parameters of thin-film material are important foundational work.whereas the present tensile machines in the market are too expensive and cannot meet the measurement needs under micro dimensions

a tensile test system of thin film material is designed which can activate precise and steady load.And a tensile test virtual instrument is programmed by LabVIEW to collect

analyze

process and store those data in tests

and output control signals.This system has the advantage of high resolution of 1 μm and 1mN

thereby satisfying the need of the micro-dimension tests.

关键词

Keywords

references

微构件力学性能片外拉伸测试装置 [J]. 沈洪源,褚金奎,张段芹,罗汝林. 传感器与微系统 . 2007(07)

一种MEMS薄膜材料的力学性能测试方法 [J]. 李雪萍,丁桂甫,安藤妙子,式田光宏,佐藤一雄. 传感器与微系统 . 2007(02)

微构件力学性能片外拉伸测试实验装置研究 [D]. 沈洪源. 大连理工大学 2006

微电子机械系统材料力学性能测试方法的研究 [D]. 汤忠斌. 西北工业大学 2004

虚拟仪器的设计与实现[M]. 西安电子科技大学出版社 , 张易知等编著, 2002

机电传动控制[M]. 华中科技大学出版社 , 邓星钟主编, 2001

机械工程测试技术基础[M]. 机械工业出版社 , 严普强, 1985

Tensile testing of microfabricated thin films [J] . H. Ogawa,K. Suzuki,S. Kaneko,Y. Nakano,Y. Ishikawa,T. Kitahara. Microsystem Technologies . 1997 (3)

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