Non-contact dynamic silicon wafer tester based on virtual instrument

YAN You-jun1; LI Yun-fei2

doi:10.13873/j.1000-97872010.03.023

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Non-contact dynamic silicon wafer tester based on virtual instrument

更新时间：2025-09-11

- Non-contact dynamic silicon wafer tester based on virtual instrument
- Vol. 29, Issue 3, Pages: 59-61(2010)
- 作者机构：
  
  1. 苏州市职业大学电子信息工程系
  2. 苏州大学计算机科学与技术学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872010.03.023
  CLC： TP216;TN304.07
- Published：2010
- 稿件说明：
移动端阅览
[1]颜友钧,李云飞.基于虚拟仪器的动态非接触式硅片测试仪[J].传感器与微系统,2010,29(03):59-61.

YAN You-jun1, LI Yun-fei2. Non-contact dynamic silicon wafer tester based on virtual instrument[J]. 2010, 29(3): 59-61.
[1]颜友钧,李云飞.基于虚拟仪器的动态非接触式硅片测试仪[J].传感器与微系统,2010,29(03):59-61. DOI： 10.13873/j.1000-97872010.03.023.

YAN You-jun1, LI Yun-fei2. Non-contact dynamic silicon wafer tester based on virtual instrument[J]. 2010, 29(3): 59-61. DOI： 10.13873/j.1000-97872010.03.023.

摘要

阐述了动态非接触式硅片测试仪的原理、组成、功能和特点。从虚拟仪器的原理出发

构建了基于虚拟仪器的动态非接触式硅片测试平台

它将电容位移传感器测距技术、电涡流传感器体电阻测试技术和红外光脉冲传感器半导体P/N极性测试技术进行有机的融合

不仅模拟了信号发生器、数字示波器、程控电源、数字万用表等测试仪器

而且

还具有数据管理、运动控制、位置检测等功能

能对太阳能电池硅片厚度、电阻率、P/N极性等参数进行高速、精确检测和动态筛选

是光伏产业大规模生产的必备之选。

Abstract

Principle

composition

functions and features of non-contact dynamic silicon wafer tester are presented.A dynamic non-contact silicon chip test rig is developed based on virtual instrument

which incorporates shift testing of capacitance distance sensor technology

body resistance-testing technology of eddy-current sensor and semiconductor P/N polarity testing technology of infrared optical pulse sensor.The instrument not only simulates the testing instruments such as signal generator

digital oscillograph

programmable power supply and digital multimeter

but also has the function of data management

moving control

and location test

etc.It is required by large-scale production of photovoltaic industry.

关键词

Keywords

references

一种面向现场应用的虚拟仪器设计方法 [J]. 李云飞. 仪器仪表学报 . 2009(02)

Electrochemical behaviors of silicon wafers in silica slurry [J]. Xiaolan Song1), Haiping Yang1), Xunda Shi2), Xi He1), and Guanzhou Qiu1) 1) Department of Inorganic Materials, School of Minerals Processing and Bioengineering, Central South University, Changsha 410083, China 2) Silicon Wafer Manufacture Department, Grinm Semiconductor Materials Co. Ltd., Beijing 100088, China. Journal of University of Science and Technology Beijing . 2008(04)

基于Web和Labview的虚拟仪器实验平台设计 [J]. 米西峰. 微计算机信息 . 2008(04)

电涡流传感器中变压器型等效电路的适用性研究 [J]. 于亚婷,杜平安. 仪器仪表学报 . 2007(03)

基于单片式电容传感器的动态测厚技术 [J]. 曹晓华,杨印保,殷志田. 河北理工大学学报 . 2007(01)

电涡流传感器线圈阻抗计算方法 [J]. 于亚婷,杜平安,李代生. 机械工程学报 . 2007(02)

基于电容传感器的塑膜厚度检测系统的研究(英文) [J]. 马玉真,王新华,段发阶,郑义忠,叶声华. 传感技术学报 . 2005(01)

基于虚拟仪器的多参量数据采集系统开发 [J]. 吴庆鸣,周小宏,陈东,程怀舟. 中国仪器仪表 . 2005(02)

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