Research on magnetic sensor based on magnetic-film/tuning fork

ZENG Jie; WEN Yu-mei; LI Ping; LI Jian-zhong; ZHANG Xiao-hua

doi:10.13873/j.1000-97872010.01.037

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Research on magnetic sensor based on magnetic-film/tuning fork

更新时间：2025-09-11

- Research on magnetic sensor based on magnetic-film/tuning fork
- Vol. 29, Issue 1, Pages: 117-120(2010)
- 作者机构：
  
  重庆大学光电工程学院光电技术及系统教育部重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872010.01.037
  CLC： TP212.13
- Published：2010
- 稿件说明：
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[1]曾婕,文玉梅,李平,栗建中,张小花.一种磁性薄膜/石英音叉复合磁传感器研究[J].传感器与微系统,2010,29(01):117-120.

ZENG Jie, WEN Yu-mei, LI Ping, et al. Research on magnetic sensor based on magnetic-film/tuning fork[J]. 2010, 29(1): 117-120.
[1]曾婕,文玉梅,李平,栗建中,张小花.一种磁性薄膜/石英音叉复合磁传感器研究[J].传感器与微系统,2010,29(01):117-120. DOI： 10.13873/j.1000-97872010.01.037.

ZENG Jie, WEN Yu-mei, LI Ping, et al. Research on magnetic sensor based on magnetic-film/tuning fork[J]. 2010, 29(1): 117-120. DOI： 10.13873/j.1000-97872010.01.037.

摘要

针对磁电层复合式磁传感器Q值低的问题

提出一种磁性薄膜与石英音叉复合的磁传感器结构

通过测量音叉谐振频率变化量或Q值变化量达到检测静磁场的目的。采用有限元方法对磁性薄膜的位置进行了分析

发现薄膜复合于音叉侧臂顶部有最灵敏的磁场探测能力

并进行了实验验证。实验结果表明:测量Q值变化量比测量谐振频率变化量更优

最大灵敏度为119.471/mT

测量Q值分辨率为1

石英音叉Q值稳定度为20×10-6时

该磁传感器结构对磁场的分辨率为10-6T

敏感结构在零偏置磁场时Q值达2000左右。

Abstract

A tuning fork magnetic sensor structure is designed by using one chip magnetic-film compound with quartz tuning fork to settle the problem of low Q value in magnetic-electric lamination magnetic sensor.The static magnetic field is detected through measuring the change of resonant frequency or Q value.The compound position of film is analyzed using the finite element analysis.The most sensitive compound position is the top of the tuning fork side arm

and the experiment proof is proceed.Experiment result indicates that the measured Q value is better than measured frequency

the highest sensitivity of Q value is 119.471/mT

and the resolution of the magnetic field can reach 10-6T when the resolution of Q value is 1 and the Q value stability of tuning fork is 20×10-6

the Q value is about 2 000 at zero bias magnetic filed.

关键词

Keywords

references

采用弹性基底的磁电复合结构有限元分析 [J]. 程磊,文玉梅,李平,卞雷祥,曾婕. 传感技术学报 . 2008(08)

压电石英晶体[M]. 国防工业出版社 , 秦自楷等编, 1980

Application of commercially available cantilevers in tuning fork Scanning Probe Microscopy （SPM） studies [J] . S Rozhok,V Chandrasekhar. Solid State Communications . 2002 (12)

Noncontact atomic force microscopy in liquid environment with quartz tuning fork and carbon nanotube probe [J] . Masami Kageshima,Henriette Jensenius,Martin Dienwiebel,Yoshikazu Nakayama,Hiroshi Tokumoto,Suzanne P. Jarvis,Tjerk H. Oosterkamp. Applied Surface Science . 2002 (3)

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