Gas sensing properties of SnO<sub>2</sub> films by La-doped

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Gas sensing properties of SnO₂ films by La-doped

更新时间：2025-09-11

- Gas sensing properties of SnO₂ films by La-doped
- Vol. 29, Issue 1, Pages: 55-57+61(2010)
- 作者机构：
  
  内蒙古大学物理科学与技术学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872010.01.003
  CLC： O484.4
- Published：2010
- 稿件说明：
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[1]谢俊叶,李健,汪良.稀土La掺杂SnO_2薄膜气敏特性[J].传感器与微系统,2010,29(01):55-57+61.

XIE Jun-ye, LI Jian, WANG Liang. Gas sensing properties of SnO₂ films by La-doped[J]. 2010, 29(1): 55-57+61.
[1]谢俊叶,李健,汪良.稀土La掺杂SnO_2薄膜气敏特性[J].传感器与微系统,2010,29(01):55-57+61. DOI： 10.13873/j.1000-97872010.01.003.

XIE Jun-ye, LI Jian, WANG Liang. Gas sensing properties of SnO₂ films by La-doped[J]. 2010, 29(1): 55-57+61. DOI： 10.13873/j.1000-97872010.01.003.

摘要

用真空热蒸发两步法在玻璃衬底制备SnO2和La掺杂SnO2薄膜。研究氧化、热处理工艺和La掺杂含量对SnO2薄膜结构、气敏特性的影响。结果显示:经T=550℃

t=45 min氧化、热处理后

得到n型金红石结构SnO2薄膜。适当掺La可改善SnO2薄膜结晶状况

掺La后SnO2薄膜对气体的选择性和灵敏性均得到明显的改善

在气体体积分数为1×10-2时

掺La（5%）的SnO2薄膜对乙醇的灵敏度为12;掺La（3%）的SnO薄膜对丙酮的灵敏度可达到14。

Abstract

SnO2 thin films and La-doped SnO2 thin films are prepared by two-step vacuum thermal evaporation on glass substrates.The effect of oxidation

heat-treatment and doping content of La on the structure

sensitive characteristics of SnO2 films is studied.The results show that SnO2 thin films are n-type rutile structure by the heat-treatment of 45 min in O2 at temperature of 500 ℃.The proper doping of La can mend the crystal status of the SnO2 films

for which the choice and sensitive characteristics for gases can be improved obviously after doping.When gas volume fraction is 1×10-2

the sensitivity of SnO2 thin films La-doped（5 %） to ethanol is 12

whereas that can approach to 14 for La-doped（3 %）.

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references

SnO 2-x 薄膜非化学计量比对气敏性能的影响 [J]. 王磊,杜军,毛昌辉,杨志民,熊玉华. 材料科学与工程学报 . 2007(01)

稀土Nd掺杂纳米SnO 2 薄膜气敏特性 [J]. 高燕,李健,吉雅图,韩菲. 传感器技术 . 2005(06)

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