A novel closed-loop micro-nano positioning scanner system in accordance with the property of PZT under small thrust is presented.The main core of the system is 80C196KC

used 12-bit A/D converter MAX120 and 12-bit D/A converter DA7521 as D/A conversion

part of the pre-driven simulation uses low-voltage operational amplifier error and post-high-precision operational amplifier composed of two-stage amplification module.Part of control uses fuzzy-PID complex control algorithms for dealing with non-linear.The hysteresis

creep and non-linear of PZT is improved well.The system can be applied to white-light phase-shifting interference detection

experimental result shows that maximum closed-loop voltage error is 18 mV

positional repeat accuracy is 6nm

system relative error is 0.15%.With the displacement of 10μm

the step-response time is about 20ms in curve of displacement-time.In the wiggle curve with driving voltage of 80V

creep within 3min is 3.6% and after the change is slower.