Design of microhumidity sensor with environmental temperature self-compensation function

YU Jin1; MA Qin2; ZHANG Hong-quan2

doi:10.13873/j.1000-97872009.10.032

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Design of microhumidity sensor with environmental temperature self-compensation function

更新时间：2025-09-11

- Design of microhumidity sensor with environmental temperature self-compensation function
- Vol. 28, Issue 10, Pages: 70-72(2009)
- 作者机构：
  
  1. 国防科工局军工项目中心
  2. 哈尔滨工程大学
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872009.10.032
  CLC： TP212
- Published：2009
- 稿件说明：
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[1]于进,马锓,张洪泉.具有环境温度自补偿功能的微湿度传感器设计[J].传感器与微系统,2009,28(10):70-72.

YU Jin1, MA Qin2, ZHANG Hong-quan2. Design of microhumidity sensor with environmental temperature self-compensation function[J]. 2009, 28(10): 70-72.
[1]于进,马锓,张洪泉.具有环境温度自补偿功能的微湿度传感器设计[J].传感器与微系统,2009,28(10):70-72. DOI： 10.13873/j.1000-97872009.10.032.

YU Jin1, MA Qin2, ZHANG Hong-quan2. Design of microhumidity sensor with environmental temperature self-compensation function[J]. 2009, 28(10): 70-72. DOI： 10.13873/j.1000-97872009.10.032.

摘要

设计了基于微加工技术的微湿度传感器

介绍了湿度传感器基于差分电路原理的温度补偿方法

实验证明:制作的湿度传感器具有半对数线性

环境温度为10

0℃时

湿度传感器输出变化小于±4%RH。

Abstract

The microhumidity sensor are designed based on micro-machining technology.A temperature compensation method of the humidity sensors based on differential circuit is introduced.Experiments show that the humidity sensor has semi-logarithmic linearity.The output of humidity sensors is less than ±4 %RH when environmetal temperature is 10

0 ℃.

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references

钠米晶LaCo 0.2 Fe 0.8 O 3 的制备及湿敏特性研究 [J]. 王竹仪,陈骋,冯彩慧,吴凤清. 微纳电子技术 . 2007(Z1)

基于MEMS技术微双桥催化LPG传感器研究 [J]. 张洪泉,施云波,郭建英. 传感技术学报 . 2006(05)

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