Study on novel gas sensor with 3D sensitive effect

YANG Ying; CHEN Xiang-dong; QIU Xiu-rong

doi:10.13873/j.1000-97872009.10.026

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Study on novel gas sensor with 3D sensitive effect

更新时间：2025-09-11

- Study on novel gas sensor with 3D sensitive effect
- Vol. 28, Issue 10, Pages: 39-41+45(2009)
- 作者机构：
  
  西南交通大学信息科学与技术学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872009.10.026
  CLC： TP212
- Published：2009
- 稿件说明：
移动端阅览
[1]杨英,陈向东,邱秀荣.一种新型三维敏感气体传感器的研究[J].传感器与微系统,2009,28(10):39-41+45.

YANG Ying, CHEN Xiang-dong, QIU Xiu-rong. Study on novel gas sensor with 3D sensitive effect[J]. 2009, 28(10): 39-41+45.
[1]杨英,陈向东,邱秀荣.一种新型三维敏感气体传感器的研究[J].传感器与微系统,2009,28(10):39-41+45. DOI： 10.13873/j.1000-97872009.10.026.

YANG Ying, CHEN Xiang-dong, QIU Xiu-rong. Study on novel gas sensor with 3D sensitive effect[J]. 2009, 28(10): 39-41+45. DOI： 10.13873/j.1000-97872009.10.026.

摘要

在平面微电极式结构的基础上

提出了一种新型薄膜气体传感器

其主要结构引用了离散阵列的概念

将传统的长方体型薄膜改进为由多条小长方体有间隔的并行排列的离散结构

使敏感薄膜具有了三维敏感效应。根据半导体气敏薄膜的扩散响应理论

对传感器的响应时间和灵敏度特性进行了理论分析

证明新型传感器具有响应时间更短、灵敏度更高的优点;并分析了薄膜厚度对传感器响应时间的影响。

Abstract

A novel film gas sensor is proposed based on the plane microelectrode structure

using the numerous small cuboids in turns instead of conventional planar film structure by citing the concept of discrete array.This development makes the film have the ability of 3D sensitive effect.According to the proliferation response theory of semiconductor film

a theoretical analysis is made on the sensitivity and response time of the sensor

which proves that the new sensor has an advantage over the conventional one on the response time and sensitivity.And effect of thickness of gas sensing thin film on gas response time is analyzed.

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references

气体传感器的应用与发展 [J]. 刘新,李淑娥. 中国西部科技 . 2008(14)

基于La 0.7 Sr 0.3 FeO 3 的微结构乙醇气体传感器的研制 [J]. 刘丽,张彤,漆奇,陈维友,徐宝琨. 半导体学报 . 2007(04)

电阻式半导体气体传感器 [J]. 张强,管自生. 仪表技术与传感器 . 2006(07)

ZrO 2 氧传感器多孔电极中气体扩散过程模拟 [J]. 夏风,钱晓良,杨欣,刘光葵,孙尧卿. 传感技术学报 . 2001(02)

平面电极LB膜气体传感器的响应特性 [J]. 杨得全,范垂祯. 传感器技术 . 1997(04)

敏感材料与传感器[M]. 化学工业出版社 , 陈艾主编, 2004

多组分气体分离[M]. 西安交通大学出版社 , 郑德馨,刘芙蓉编, 1988

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