Dynamic testing of MEMS based on laser doppler effect

HOU Shi-bo; LI Xing-fei; HE Shao-hui

doi:10.13873/j.1000-97872009.10.010

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Dynamic testing of MEMS based on laser doppler effect

更新时间：2025-09-11

- Dynamic testing of MEMS based on laser doppler effect
- Vol. 28, Issue 10, Pages: 106-107+120(2009)
- 作者机构：
  
  天津大学精密仪器与光电子工程学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872009.10.010
  CLC： TN247
- Published：2009
- 稿件说明：
移动端阅览
[1]侯世博,李醒飞,贺少辉.基于激光多普勒效应的MEMS的运动检测[J].传感器与微系统,2009,28(10):106-107+120.

HOU Shi-bo, LI Xing-fei, HE Shao-hui. Dynamic testing of MEMS based on laser doppler effect[J]. 2009, 28(10): 106-107+120.
[1]侯世博,李醒飞,贺少辉.基于激光多普勒效应的MEMS的运动检测[J].传感器与微系统,2009,28(10):106-107+120. DOI： 10.13873/j.1000-97872009.10.010.

HOU Shi-bo, LI Xing-fei, HE Shao-hui. Dynamic testing of MEMS based on laser doppler effect[J]. 2009, 28(10): 106-107+120. DOI： 10.13873/j.1000-97872009.10.010.

摘要

提出了一种可以测量微机电系统（MEMS）面内瞬时速度和位移的测量系统。该系统利用差动激光多普勒效应

采用了频移技术和接收端的滤波技术将带有MEMS运动信息的光信号接收并解调

然后

利用LabVIEW和Matlab软件对采集的信号进行数字滤波和时频分析

从而得到被测器件的运动参量

为研究MEMS的动态特性提供了准确可靠的方法。

Abstract

A system for testing transient velocities and displacements of MEMS is proposed.The system is based on differential laser Doppler effect.Frequency shift technology and wave filtering technology are used to process the signal and software LabVIEW & Matlab are used to measure its movement parameters with the mothed of digital filtering technology and time-frequency analysis.An accurate and reliable method can be provided for the research on dynamic characteristics of MEMS.

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references

MEMS国内外发展状况及我国MEMS发展战略的思考 [J]. 孙立宁,周兆英,龚振邦. 机器人技术与应用 . 2002(02)

微机电系统谐振器面内运动检测的激光多普勒方法 [D]. 钟莹. 天津大学 2005

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