Research on adaptive closed-loop drive system for capacitive micro-gyroscopes

TAN Xiao-yun; LEI Long-gang; LIU Xiao-wei

doi:10.13873/j.1000-97872009.10.004

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Research on adaptive closed-loop drive system for capacitive micro-gyroscopes

更新时间：2025-09-11

- Research on adaptive closed-loop drive system for capacitive micro-gyroscopes
- Vol. 28, Issue 10, Pages: 35-38(2009)
- 作者机构：
  
  哈尔滨工业大学MEMS中心
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872009.10.004
  CLC： V241.5
- Published：2009
- 稿件说明：
移动端阅览
[1]谭晓昀,雷龙刚,刘晓为.电容式微陀螺自适应闭环驱动系统的研究[J].传感器与微系统,2009,28(10):35-38.

TAN Xiao-yun, LEI Long-gang, LIU Xiao-wei. Research on adaptive closed-loop drive system for capacitive micro-gyroscopes[J]. 2009, 28(10): 35-38.
[1]谭晓昀,雷龙刚,刘晓为.电容式微陀螺自适应闭环驱动系统的研究[J].传感器与微系统,2009,28(10):35-38. DOI： 10.13873/j.1000-97872009.10.004.

TAN Xiao-yun, LEI Long-gang, LIU Xiao-wei. Research on adaptive closed-loop drive system for capacitive micro-gyroscopes[J]. 2009, 28(10): 35-38. DOI： 10.13873/j.1000-97872009.10.004.

摘要

对微陀螺闭环驱动系统理论进行分析讨论

结合微陀螺结构特性和自适应锁相环特点

设计一种微陀螺自适应闭环驱动系统。利用数学工具Matlab分别建立Simulink传统的自动增益控制器（AGC）方式闭环驱动系统模型和自适应闭环驱动系统模型

对其进行系统性能对比分析。分析结果表明:微陀螺自适应闭环驱动系统建立时间比传统AGC方式闭环驱动系统建立时间缩短69%

系统频率偏差仅为1 Hz

频率稳定性是传统闭环驱动系统的38.46%

系统抗噪声能力优于传统闭环驱动系统。因此

采用自适应闭环驱动系统可以提高微陀螺的检测灵敏度。

Abstract

The closed-loop drive system theory of micro-gyroscope is discussed.Considering the characteristics of the micro-gyroscope’s structure and adaptive phase-locked loop

the adaptive closed-loop drive system for micro-gyroscope is designed.Based on the traditional AGC closed-loop drive system model and adaptive closed-loop drive system model

the performances of the closed-loop drive system are simulated and analysed by the Matlab math tools Simulink software.The analysis results show that compared with the traditional AGC closed-loop drive system

setting time of the adaptive closed-loop drive system shorten 69 %.The frequency difference between driving frequency and resonant frequency is only 1 Hz.The frequency stability is 38.46 % of the traditional closed-loop drive system.The SNR of the adaptive closed-loop system is better than the traditional closed-loop drive system.So the detection sensitivity of micro-gyroscope can be improved by using the adaptive closed-loop drive system.

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Keywords

references

MEMS振动陀螺闭环自激驱动的理论分析及数值仿真 [J]. 王展飞,鲁文高,李峰,李志宏. 传感技术学报 . 2008(08)

振动式微机械陀螺的带宽特性分析 [J]. 陆学斌,刘晓为,陈伟平,陈宏,韩天. 传感技术学报 . 2008(02)

Interface and control electronics for a bulk micromachined capacitive gyroscope [J] . Mikko Saukoski,Lasse Aaltonen,Teemu Salo,Kari A.I. Halonen. Sensors & Actuators: A. Physical . 2008 (1)

A monolithic sigma-delta fractional-N frequency synthesizer with implicit dual-path filter and phase switching multi-modulus frequency divider [J] . Sheng-Meng Fu. Analog Integrated Circuits and Signal Processing . 2007 (3)

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