Design and simulation of RF MEMS switch

CHEN Gui-hui1; ZHAO Wan-ming1; ZHANG Wan-li2; PENG Bin2; XU Hai-ying1

doi:10.13873/j.1000-97872009.09.034

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Design and simulation of RF MEMS switch

更新时间：2025-09-11

- Design and simulation of RF MEMS switch
- Vol. 28, Issue 9, Pages: 91-93(2009)
- 作者机构：
  
  1. 西南石油大学电子信息工程学院
  2. 电子科技大学微电子与固体电子学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872009.09.034
  CLC： TP211.4
- Published：2009
- 稿件说明：
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[1]谌贵辉,赵万明,张万里,彭斌,许海英.RF MEMS悬臂梁开关的设计与仿真[J].传感器与微系统,2009,28(09):91-93.

CHEN Gui-hui1, ZHAO Wan-ming1, ZHANG Wan-li2, et al. Design and simulation of RF MEMS switch[J]. 2009, 28(9): 91-93.
[1]谌贵辉,赵万明,张万里,彭斌,许海英.RF MEMS悬臂梁开关的设计与仿真[J].传感器与微系统,2009,28(09):91-93. DOI： 10.13873/j.1000-97872009.09.034.

CHEN Gui-hui1, ZHAO Wan-ming1, ZHANG Wan-li2, et al. Design and simulation of RF MEMS switch[J]. 2009, 28(9): 91-93. DOI： 10.13873/j.1000-97872009.09.034.

摘要

利用有限元软件HFSS和ANSYS系统研究了串联MEMS开关的微波性能和力学性能与其结构参数之间的关系

并在此基础上优化出悬臂梁开关的几何结构参数

设计了RF MEMS开关

实验表明:在外施电压为10 V左右时

悬臂梁的挠度可达3μm左右

5 GHz时

回波损耗小于0.2 dB

隔离度大于35 dB。

Abstract

With the HFSS and ANSYS software

the relationship between the structure parameters of the RF MEMS series switch and its microwave characteristics and the mechanical behaviors is studied respectively.Based on the findings

the better geometric parameters of the cantilever is found.An RF MEMS switch is designed.Experiment shows that at 10V

the deflections of the cantilever are around 3μm.At 5GHz

an echo loss is smaller than 0.2dB and isolation is larger than 35dB.

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Keywords

references

串联RF MEMS开关的结构仿真 [J]. 谌贵辉,张万里,彭斌,蒋洪川,赵泽宇,候德胜. 光电工程 . 2005(09)

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