Study on key fabrication process of RF MEMS switch with cantilever structure

WU Qing-xin1; CHEN Guang-hong1; YU Ying2; LUO Zhong-zi3

doi:10.13873/j.1000-97872009.09.001

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Study on key fabrication process of RF MEMS switch with cantilever structure

更新时间：2025-09-11

- Study on key fabrication process of RF MEMS switch with cantilever structure
- Vol. 28, Issue 9, Pages: 118-120(2009)
- 作者机构：
  
  1. 苏州市职业大学电子信息工程系
  2. 南京邮电大学通讯与信息工程学院
  3. 厦门大学萨本栋微机电研究中心
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872009.09.001
  CLC： TM564
- Published：2009
- 稿件说明：
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[1]吴清鑫,陈光红,于映,罗仲梓.悬臂梁接触式RF MEMS开关的关键工艺研究[J].传感器与微系统,2009,28(09):118-120.

WU Qing-xin1, CHEN Guang-hong1, YU Ying2, et al. Study on key fabrication process of RF MEMS switch with cantilever structure[J]. 2009, 28(9): 118-120.
[1]吴清鑫,陈光红,于映,罗仲梓.悬臂梁接触式RF MEMS开关的关键工艺研究[J].传感器与微系统,2009,28(09):118-120. DOI： 10.13873/j.1000-97872009.09.001.

WU Qing-xin1, CHEN Guang-hong1, YU Ying2, et al. Study on key fabrication process of RF MEMS switch with cantilever structure[J]. 2009, 28(9): 118-120. DOI： 10.13873/j.1000-97872009.09.001.

摘要

采用厚度为2μm的Au制作成共平面波导（CPW）、聚酰亚胺作为牺牲层、PECVD法淀积Si3N4薄膜作为悬臂梁

制作成悬臂梁接触式RF MEMS开关。着重对开关的关键工艺——CPW的Au剥离工艺和悬臂梁制作工艺进行研究

讨论了工艺中存在的问题及其解决方法。通过实验获得较佳的工艺参数

并制作出驱动电压为12

0 V的悬臂梁接触式RF MEMS开关。

Abstract

Co-planar wave-guide is coated with 2μm thick Au film.Polyimide is used as sacrificial layer.Si3N4 suspending membrane is grown by plasma enhanced chemical vapor deposition（PECVD）.RF MEMS switch with cantilever structure is fabricated by the above processes.The key fabrication technology of RF MEMS switch is discussed including lift-off technology of Au film as co-planar wave-guide and fabrication process of suspending membrane.The optimum process parameters are obtained by different experiments.RF MEMS switch with cantilever structure with 12

0V actuation voltage is sucessfully fabricated.

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references

悬臂梁接触式RF-MEMS开关的制作研究 [J]. 孙建海,崔大付,王海宁,王利,徐磊,苏波. 微细加工技术 . 2005(01)

AZ5214E反转光刻胶的性能研究及其在剥离工艺中的应用 [J]. 陈光红,于映,罗仲梓,吴清鑫. 功能材料 . 2005(03)

接触式串联射频MEMS开关的工艺研究 [J]. 于映,罗仲梓,翁心桥. 真空科学与技术学报 . 2004(04)

低阈值电压RF MEMS开关的力学模型 [J]. 郑惟彬,黄庆安,李拂晓,金玉丰. 固体电子学研究与进展 . 2003(04)

射频微机械开关的计算机辅助设计 [J]. 魏华征,郭方敏,赖宗声,朱守正,朱自强,李小卫,程知群,孙晓玮. 半导体学报 . 2002(09)

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