Study on mechanical properties of Ni-W alloy films in micro-electro-mechanical system

LIU Rui; WANG Hong; TANG Jun; MAO Sheng-ping; CHEN Hui; DING Gui-fu

doi:10.13873/j.1000-97872009.08.005

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Study on mechanical properties of Ni-W alloy films in micro-electro-mechanical system

更新时间：2025-09-11

- Study on mechanical properties of Ni-W alloy films in micro-electro-mechanical system
- Vol. 28, Issue 8, Pages: 46-48(2009)
- 作者机构：
  
  上海交通大学微纳科学技术研究院薄膜与微细技术教育部重点实验室微米/纳米加工技术国家级重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872009.08.005
  CLC： TB383.2
- Published：2009
- 稿件说明：
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[1]刘瑞,汪红,汤俊,毛胜平,陈辉,丁桂甫.MEMS中Ni-W合金薄膜力学性能的研究[J].传感器与微系统,2009,28(08):46-48.

LIU Rui, WANG Hong, TANG Jun, et al. Study on mechanical properties of Ni-W alloy films in micro-electro-mechanical system[J]. 2009, 28(8): 46-48.
[1]刘瑞,汪红,汤俊,毛胜平,陈辉,丁桂甫.MEMS中Ni-W合金薄膜力学性能的研究[J].传感器与微系统,2009,28(08):46-48. DOI： 10.13873/j.1000-97872009.08.005.

LIU Rui, WANG Hong, TANG Jun, et al. Study on mechanical properties of Ni-W alloy films in micro-electro-mechanical system[J]. 2009, 28(8): 46-48. DOI： 10.13873/j.1000-97872009.08.005.

摘要

研究了柠檬酸胺—1—羟基乙烷二膦酸（HEDP）镀液体系中Ni-W的力学性能。通过紫外曝光的光刻、电铸和注塑（UV-LIGA）技术制备出微拉伸试样和单轴微拉伸测试系统进行拉伸试验。结果表明:在Ni-W薄膜试样尺寸为5μm×50μm×100μm条件下

其杨氏模量约为100.4 GPa

抗拉强度为1.96 GPa

应变约为3.6%。

Abstract

The mechanical properties of Ni-W alloy films electrodeposited in the system of citrate amine-HEDP are sdudied.The testing chip is fabricated with UV-LIGA technology and measured by uniaxial micro-tensile system.The gauge section of Ni-W thin film specimen is 5μm×50μm×100μm.The results show that the Young’s modulus of Ni-W film is about 100.4GPa

tensile strength is about 1.96GPa and strain is about 3.6%

respectively.

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references

微器件用Ni-W合金薄膜热稳定性的研究 [J]. 刘瑞,汪红,姚锦元,李雪萍,丁桂甫,赵小林. 功能材料 . 2008(02)

Friction and wear characteristics of electrodeposited nanocrystalline nickel–tungsten alloy films [J] . A.S.M.A. Haseeb,U. Albers,K. Bade. Wear . 2007 (1)

High temperature oxidation of Ni–W coatings electroplated on steel [J] . D.B Lee,J.H Ko,S.C Kwon. Materials Science & Engineering A . 2004 (1)

A review of MEMS-based microscale and nanoscale tensile and bending testing [J] . M. A. Haque,M. T. A. Saif. Experimental Mechanics . 2003 (3)

Formation of amorphous electrodeposited Ni-W alloys and their nanocrystallization [J] . T. Yamasaki,P. Schloβmacher,K. Ehrlich,Y. Ogino. Nanostructured Materials . 1998 (3)

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