Structure design and experimental research of pre-stressed piezoelectric pump

Lü Kun-yong1; GU Xue-lian1; WANG Qin2; LUO Qi-yi1

doi:10.13873/j.1000-97872009.08.002

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Structure design and experimental research of pre-stressed piezoelectric pump

更新时间：2025-09-11

- Structure design and experimental research of pre-stressed piezoelectric pump
- Vol. 28, Issue 8, Pages: 30-32+36(2009)
- 作者机构：
  
  1. 上海理工大学医疗器械与食品学院
  2. 微创医疗器械(上海)有限公司
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872009.08.002
  CLC： TH38
- Published：2009
- 稿件说明：
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[1]吕坤勇,谷雪莲,王勤,罗七一.预应力压电泵的结构设计与实验研究[J].传感器与微系统,2009,28(08):30-32+36.

Lü Kun-yong1, GU Xue-lian1, WANG Qin2, et al. Structure design and experimental research of pre-stressed piezoelectric pump[J]. 2009, 28(8): 30-32+36.
[1]吕坤勇,谷雪莲,王勤,罗七一.预应力压电泵的结构设计与实验研究[J].传感器与微系统,2009,28(08):30-32+36. DOI： 10.13873/j.1000-97872009.08.002.

Lü Kun-yong1, GU Xue-lian1, WANG Qin2, et al. Structure design and experimental research of pre-stressed piezoelectric pump[J]. 2009, 28(8): 30-32+36. DOI： 10.13873/j.1000-97872009.08.002.

摘要

提出了一种由压电晶片驱动的新结构微泵

采用精密机械加工工艺制作而成。设计了预应力阀膜

组装压电微泵

对预应力阀的可靠性和压电微泵的液体输送特性做了研究。通过系统的实验研究证明:预应力压电泵具有很好的防倒吸能力

稳定性高

具有很好的工作性能

在250 V

200Hz方波信号下

流速可达5.502 7mL/min

且适于微型化

可为该类型泵的实际应用提供有意义的借鉴。

Abstract

The design and realization of pre-stressed valve are described and it is applied into the micropump.Based on precision machining

the pump is fabricated and assembled.Relevant experiments are carried out to study the reliability of the pre-stressed valve and the transport property of the pump.The results indicate that pre-stressed valves can prevent fluid reverse effectively and the pump has excellent stability and great performance

under the square wave driving voltage of 250V

200Hz

the pump is able to provide flow rates up to 5.5027mL/min

and this kind of pump also can be used in micro-applications.The design of the pre-stressed valve and the structure of the pump are useful to the development of the applied piezoelectric micopump.

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Keywords

references

基于悬臂梁阀的微型压电泵的实验研究 [J]. 程光明,刘国君,杨志刚,曾平. 机械科学与技术 . 2005(10)

压电微型泵的制造新工艺 [J]. 刘收,姚立强,姜兴刚,王益红,陈志同. 新技术新工艺 . 2004(07)

基于MEMS的微泵研究进展 [J]. 王沫然,李志信. 传感器技术 . 2002(06)

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