Design of new capacitive gas sensor for SO<sub>2</sub> with three-dimensional sensitive effect

ZHAO Liang; CHEN Xiang-dong; YANG Ying; ZHANG Qing-jin

doi:10.13873/j.1000-97872009.07.033

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Design of new capacitive gas sensor for SO₂ with three-dimensional sensitive effect

更新时间：2025-09-11

- Design of new capacitive gas sensor for SO₂ with three-dimensional sensitive effect
- Vol. 28, Issue 7, Pages: 68-70(2009)
- 作者机构：
  
  西南交通大学信息科学与技术学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872009.07.033
  CLC： TP212
- Published：2009
- 稿件说明：
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[1]赵良,陈向东,杨英,张清锦.一种新型三维敏感效应电容式SO_2气体传感器设计[J].传感器与微系统,2009,28(07):68-70.

ZHAO Liang, CHEN Xiang-dong, YANG Ying, et al. Design of new capacitive gas sensor for SO₂ with three-dimensional sensitive effect[J]. 2009, 28(7): 68-70.
[1]赵良,陈向东,杨英,张清锦.一种新型三维敏感效应电容式SO_2气体传感器设计[J].传感器与微系统,2009,28(07):68-70. DOI： 10.13873/j.1000-97872009.07.033.

ZHAO Liang, CHEN Xiang-dong, YANG Ying, et al. Design of new capacitive gas sensor for SO₂ with three-dimensional sensitive effect[J]. 2009, 28(7): 68-70. DOI： 10.13873/j.1000-97872009.07.033.

摘要

传统气体传感器只能以简单一维扩散方式对气体响应

扩散机理是建立在表面效应基础上的。提出了一种新型电容式SO2气体传感器。该传感器敏感结构由离散的微型圆柱体单元三维式扩散模型组成

模型上表面和侧面同时接触被测气体

扩大了与被测气体的接触面积。根据气敏薄膜的扩散响应理论

对传感器的响应时间作出分析

并与梳状电容式气体传感器特性相比较

说明新型传感器具有响应时间更短的优点。

Abstract

The response mechanism of traditional gas sensor is based on surface effect by one-dimensional diffusion.A new capacitive gas sensor for SO2 is put forward.The structure is made up of cylinder model with three-dimensional diffusion

which upper and side surfaces can meet the gas at the same time to enlarge the area with gas.According to the theory of film diffusion

the response time of gas sensor is analyzed and compared with traditional sensor

and the new gas sensor has less response time.

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Keywords

references

梳状电极电容式SO 2 气体传感器 [J]. 王道,陈霭番,武少华. 传感技术学报 . 2001(04)

有机敏感材料梳状电极电容式SO 2 传感器的研究 [J]. 李丽,王道,刘显武. 化学传感器 . 2000(04)

传感器原理及应用[M]. 国防工业出版社 , 朱蕴璞,孔德仁,王芳编著, 2005

半导体器件工艺原理[M]. 国防工业出版社 , 黄汉尧著, 1980

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Design of new capacitive gas sensor for SO2 with three-dimensional sensitive effect

DOI：10.13873/j.1000-97872009.07.033

摘要

Abstract

关键词

Keywords

references

Design of new capacitive gas sensor for SO₂ with three-dimensional sensitive effect