Study on new type MEMS bi-stable electromagnetic actuator

ZHANG Xiao-peng; DAI Xu-han; MIAO Xiao-dan; DING Gui-fu; ZHAO Xiao-lin

doi:10.13873/j.1000-97872009.06.039

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Study on new type MEMS bi-stable electromagnetic actuator

更新时间：2025-09-11

- Study on new type MEMS bi-stable electromagnetic actuator
- Vol. 28, Issue 6, Pages: 117-120(2009)
- 作者机构：
  
  上海交通大学微米/纳米加工技术国家重点实验室薄膜与微细技术教育部重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872009.06.039
  CLC： TP211.4
- Published：2009
- 稿件说明：
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[1]张晓鹏,戴旭涵,苗小丹,丁桂甫,赵小林.一种新型MEMS双稳态微电磁驱动器的研究[J].传感器与微系统,2009,28(06):117-120.

ZHANG Xiao-peng, DAI Xu-han, MIAO Xiao-dan, et al. Study on new type MEMS bi-stable electromagnetic actuator[J]. 2009, 28(6): 117-120.
[1]张晓鹏,戴旭涵,苗小丹,丁桂甫,赵小林.一种新型MEMS双稳态微电磁驱动器的研究[J].传感器与微系统,2009,28(06):117-120. DOI： 10.13873/j.1000-97872009.06.039.

ZHANG Xiao-peng, DAI Xu-han, MIAO Xiao-dan, et al. Study on new type MEMS bi-stable electromagnetic actuator[J]. 2009, 28(6): 117-120. DOI： 10.13873/j.1000-97872009.06.039.

摘要

介绍了一种新型MEMS双稳态微电磁驱动器

通过理论分析和有限元分析工具Ansys对器件的结构参数进行了优化设计

并证明了设计的可行性。利用金属基表面微加工技术与体硅微加工技术成功制作出这种驱动器

并对其弹性平台的弹性系数进行了标定

对驱动器的双稳态进行了调试。结果表明:此驱动器具有良好的双稳特性

响应时间短（约10m s）的特点。

Abstract

A new type MEMS bi-stable electromagnetic actuator is presented.The parameters of the device are optimized by theoretical analysis and Ansys.The feasibility of the design is also proved.The bulk silicon micromachining and metal-based surface micromachining technology is used to fabricate this actuator.The elasticity coefficient of the device is measured

and so is the bi-stable characteristic of the MEMS micro-magnetic actuator.The results show that the device has good performance of bi-stable actuation

and the response time is short（about 10 ms）.

关键词

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references

平面线圈型MEMS微电磁驱动器的理论分析与实验研究 [J]. 杨昊宇,赵小林,戴旭涵,邵国成,丁桂甫. 传感技术学报 . 2006(05)

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