Design of MEMS engine oil pressure sensor

GUAN Rong-feng1; WANG Xiao-xue2

doi:10.13873/j.1000-97872009.06.033

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Design of MEMS engine oil pressure sensor

更新时间：2025-09-11

- Design of MEMS engine oil pressure sensor
- Vol. 28, Issue 6, Pages: 86-88(2009)
- 作者机构：
  
  1. 河南理工大学材料科学与工程学院
  2. 河南理工大学理化系
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872009.06.033
  CLC： TP212
- Published：2009
- 稿件说明：
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[1]关荣锋,王晓雪.MEMS机油压力传感器设计[J].传感器与微系统,2009,28(06):86-88.

GUAN Rong-feng1, WANG Xiao-xue2. Design of MEMS engine oil pressure sensor[J]. 2009, 28(6): 86-88.
[1]关荣锋,王晓雪.MEMS机油压力传感器设计[J].传感器与微系统,2009,28(06):86-88. DOI： 10.13873/j.1000-97872009.06.033.

GUAN Rong-feng1, WANG Xiao-xue2. Design of MEMS engine oil pressure sensor[J]. 2009, 28(6): 86-88. DOI： 10.13873/j.1000-97872009.06.033.

摘要

由于汽车应用环境相当恶劣

对机油压力传感器的可靠性要求很高。采用波纹膜片隔离技术设计了一种新型的MEMS机油压力传感器。分析了波纹膜片、充油腔体结构及硅油对压力传感器性能的影响。理论和实验结果指出

合理的设计波纹结构、充油腔体结构、减小腔体体积及净化好硅油是获得高性能机油压力传感器的关键。研制的传感器在温度为-40

25℃

量程为0.6MPa的工作条件下

测量精度优于1.5%。

Abstract

There are high reliability requirements for the MEMS oil pressure sensors because of worse automotive application environment.A new type MEMS oil pressure sensor based on ripple membrane isolating technique is designed.The effect of the ripple membrane and the cavity structure of filling oil on sensor performance is analyzed.The theory analyzing and experimental results demonstrate to design suitably the ripple membrane and the cavity structure

reduce cavity volume and purify silica oil are a key to improve oil pressure sensor performances.The measuring precise of developed sensors is superior to 1.5 % at-40～125 ℃ and 0.6 MPa.

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references

汽车传感器的现状与发展趋势 [J]. 秦永和,李伟,程本同,刘光辉. 传感器技术 . 2003(12)

提高微压传感器灵敏度的深盆腔压力膜片研究(一) [J]. 郑丹,宋朝辉,张鲲. 仪表技术与传感器 . 2002(11)

隔离膜片特性及其对变送器性能的影响 [J]. 闫旭强. 石油化工自动化 . 1998(04)

微传感器与微执行器全书[M]. 科学出版社 , (美)格雷戈里T.A.科瓦奇（GregoryT.A.Kovacs）著, 2003

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