Study on piezoelectric micro-motion stage at nanometer-scale

QI Yong-yue; LIN Yu-chi; ZHANG Li; ZHAO Mei-rong

doi:10.13873/j.1000-97872009.06.025

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Study on piezoelectric micro-motion stage at nanometer-scale

更新时间：2025-09-11

- Study on piezoelectric micro-motion stage at nanometer-scale
- Vol. 28, Issue 6, Pages: 53-55+58(2009)
- 作者机构：
  
  天津大学精密测试技术及仪器国家重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872009.06.025
  CLC： TP274
- Published：2009
- 稿件说明：
移动端阅览
[1]齐永岳,林玉池,张立,赵美蓉.纳米级压电微动台的设计研究[J].传感器与微系统,2009,28(06):53-55+58.

QI Yong-yue, LIN Yu-chi, ZHANG Li, et al. Study on piezoelectric micro-motion stage at nanometer-scale[J]. 2009, 28(6): 53-55+58.
[1]齐永岳,林玉池,张立,赵美蓉.纳米级压电微动台的设计研究[J].传感器与微系统,2009,28(06):53-55+58. DOI： 10.13873/j.1000-97872009.06.025.

QI Yong-yue, LIN Yu-chi, ZHANG Li, et al. Study on piezoelectric micro-motion stage at nanometer-scale[J]. 2009, 28(6): 53-55+58. DOI： 10.13873/j.1000-97872009.06.025.

摘要

提出了一种新颖的"推—拉"接力运动原理

并将其应用于纳米级步距压电微动台的设计中。该原理变传统的单驱动器结构为双驱动器结构

避免了运动过程中的悬空状态

配以适当的四路驱动信号

使压电微动台能够实现连续、平稳的运动。根据使用要求设计了驱动控制系统

通过C8051F单片机产生四路驱动信号

以保证压电微动台在不同频率和电压下进行工作

并实现了整个系统的闭环控制。

Abstract

A novel principle of push-pull relay movement is proposed and applied in the design of the piezoelectric micro-motion stage.In structure design the traditional single actuator is updated to the double actuators in order to avoid the impending state.With the proper four-channel driving signals

the stage can move continuously and smoothly.The driving and controlling system is designed.The four-channel driving signals with different voltage and frequency are generated by C8051F MCU.In addition the close-loop position is realized.

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Keywords

references

压电线性马达与纳米马达 [J]. 费继承,王庆康,万永中,段智勇. 压电与声光 . 2003(04)

压电马达用压电陶瓷的研究 [J]. 严继康,甘国友,孙加林,陈敬超. 压电与声光 . 2002(04)

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Related Author

WANG Wenhui

LIN Maohu

HU Junfeng

QIN Feng

QI Yong-yue

ZHAO Mei-rong

LIN Yu-chi

ZHANG Li

Related Institution

School of Mechanical and Electrical Engineering,Jiangxi University of Science and Technology

State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University

State Key Laboratory of Precision Measurement Technology and Instrument,Tianjin University

School of Physics,KIM IL SUNG University,D.P.R.

天津大学精密测试技术及仪器国家重点试验室

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