Development of sensor’s film structure and analysis of response time

YANG Ying; CHEN Xiang-dong; CAI Bin

doi:10.13873/j.1000-97872009.05.038

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Development of sensor’s film structure and analysis of response time

更新时间：2025-09-11

- Development of sensor’s film structure and analysis of response time
- Vol. 28, Issue 5, Pages: 52-54(2009)
- 作者机构：
  
  西南交通大学信息科学与技术学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872009.05.038
  CLC： TP212
- Published：2009
- 稿件说明：
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[1]杨英,陈向东,蔡镔.传感器薄膜结构的改进与响应时间的分析[J].传感器与微系统,2009,28(05):52-54.

YANG Ying, CHEN Xiang-dong, CAI Bin. Development of sensor’s film structure and analysis of response time[J]. 2009, 28(5): 52-54.
[1]杨英,陈向东,蔡镔.传感器薄膜结构的改进与响应时间的分析[J].传感器与微系统,2009,28(05):52-54. DOI： 10.13873/j.1000-97872009.05.038.

YANG Ying, CHEN Xiang-dong, CAI Bin. Development of sensor’s film structure and analysis of response time[J]. 2009, 28(5): 52-54. DOI： 10.13873/j.1000-97872009.05.038.

摘要

提出了一种具有立体敏感效应的新型气体传感器敏感薄膜结构模型

即将传统的厚度均匀的平面型传感器敏感薄膜改进为由多条半圆柱凸起与多条沟槽相间隔的立体敏感结构。并根据扩散反应理论对新型和传统型2种薄膜结构的传感器响应时间进行了分析与比较

证明新型敏感结构的传感器具有更短的响应时间;分析了半圆柱凸起间距的相对系数对传感器响应时间的影响

得出了最佳取值。

Abstract

A new film structure model of gas sensor with three-dimensional sensitive effect is provided

which is improving the traditional planar structure of uniform thickness to the new sensitive three-dimensional structure with more half-cylinder uplifts and more grooves.According to the proliferation response theory

the film sensor response times of both new and traditional structure sensor are analyzed and compared.This proves that the response time of the sensor with the new sensitive structure is short.And the influence of the half-cylinder bulges spacing relative coefficient on the sensor response time is analyzed

the best value is obtained.

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references

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In 2 O 3 基气体传感器研究现状 [J]. 詹自力,徐甲强,蒋登高. 传感器技术 . 2003(03)

WO 3 基H 2 S气敏材料的研究 [J]. 徐甲强,闫冬良,王国庆,田志壮,江青萍. 硅酸盐学报 . 1999(05)

敏感材料与传感器[M]. 化学工业出版社 , 陈艾主编, 2004

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Characterization of activated reactive evaporated MoO 3 thin films for gas sensor applications [J] . O.M Hussain,K.S Rao. Materials Chemistry and Physics . 2003 (3)

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