Research on preparation process of polyimide capacitive humidity sensor

YANG Zi-jian; WEI Bo; WANG Jing-song; CUI Qian-hong; YANG Jian-hong

doi:10.13873/j.1000-97872009.04.028

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Research on preparation process of polyimide capacitive humidity sensor

更新时间：2025-09-11

- Research on preparation process of polyimide capacitive humidity sensor
- Vol. 28, Issue 4, Pages: 56-58(2009)
- 作者机构：
  
  兰州大学物理学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872009.04.028
  CLC： TP212
- Published：2009
- 稿件说明：
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[1]杨子健,韦波,王敬松,崔千红,杨建红.聚酰亚胺电容式湿度传感器的制备工艺研究[J].传感器与微系统,2009,28(04):56-58.

YANG Zi-jian, WEI Bo, WANG Jing-song, et al. Research on preparation process of polyimide capacitive humidity sensor[J]. 2009, 28(4): 56-58.
[1]杨子健,韦波,王敬松,崔千红,杨建红.聚酰亚胺电容式湿度传感器的制备工艺研究[J].传感器与微系统,2009,28(04):56-58. DOI： 10.13873/j.1000-97872009.04.028.

YANG Zi-jian, WEI Bo, WANG Jing-song, et al. Research on preparation process of polyimide capacitive humidity sensor[J]. 2009, 28(4): 56-58. DOI： 10.13873/j.1000-97872009.04.028.

摘要

改变传统丝网印刷制作电极的方法

采用正胶反刻、干湿结合的CMOS工艺研制出了以聚酰亚胺为感湿介质的相对电容式湿度传感器。并对其结构进行了理论分析

确定了湿度传感器的工艺步骤和版图设计。对其测量范围、湿滞和响应时间进行了测试。通过实验结果与模拟结果的对比分析

给出了该实验中存在的问题和改进意见。

Abstract

A new structure of the capacitive polyimide humidity sensor which is compatible with standard CMOS technology is prepared.The process is confirmed

and the layout is designed.The parameters of the humidity sensor such as range of measurement and response time are measured.Theoretical simulation is made and compared with the experimental results.The problems and solutions in the experiment are given.

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references

高分子湿度传感器的研制 [J]. 陈翠萍,蒋波,谢光忠,蒋亚东. 仪表技术与传感器 . 2005(10)

CMOS工艺兼容的温湿度传感器 [J]. 彭韶华,黄庆安,秦明,张中平. 半导体学报 . 2005(07)

一种新型CMOS兼容湿度传感器 [J]. 顾磊,黄庆安,秦明,张中平,严先蔚. 半导体学报 . 2004(02)

湿度传感器用聚酰亚胺材料亚胺化工艺研究 [J]. 谢琼,杨文,常爱民,康健. 应用化工 . 2003(06)

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