The flexible serpentine spring is widely used as the variable capacitor movable plate’s support structure of the capacitive RF MEMS with the characteristic of low actuation voltage.The reason is the low elastic coefficient of flexible serpentine spring makes the compliant structure’s elastic coefficient of the switch very low.Low compliant structure’s elastic coefficient also leads to the low switch’s first model resonance frequency in dynamic situation.The disadvantage of the low switch’s first model resonance frequency is that it can’t make the switch to switch high speed.The way of adjusting the compliant structure’s elastic coefficient through changing the flexible serpentine spring’s plane angle is put forward.The purpose of the way is to improve the compliant structure’s first model resonance frequency as much as possible and also the switch’s actuation voltage is also kept low.MEMS CAD software CoventorWare is used to simulate the mechanical and electrical characteristics of the capacitive RF MEMS switches with different flexible serpentine spring’s plane angle

but the other structure parameters of the switch are not changed.The respective flexible serpentine spring’s plane angles are 0°

45°and 90°.How effect of flexible serpentine spring’s plane angle on the micro structure’s elastic coefficient is qualitatively analyzed.The results demonstrate that the actuation voltage and the first model resonance frequency of the capacitive RF MEMS switch can be adjusted by changing the flexible serpentine spring’s plane angle.