Research on MEMS NO<sub>2</sub> micro gas sensor

LIU Xin

doi:10.13873/j.1000-97872009.02.032

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Research on MEMS NO₂ micro gas sensor

更新时间：2025-09-11

- Research on MEMS NO₂ micro gas sensor
- Vol. 28, Issue 2, Pages: 48-49+52(2009)
- 作者机构：
  
  黑龙江科技学院计算机与信息工程学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872009.02.032
  CLC： TP212
- Published：2009
- 稿件说明：
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[1]刘鑫.MEMS微型NO_2气体传感器的研究[J].传感器与微系统,2009,28(02):48-49+52.

LIU Xin. Research on MEMS NO₂ micro gas sensor[J]. 2009, 28(2): 48-49+52.
[1]刘鑫.MEMS微型NO_2气体传感器的研究[J].传感器与微系统,2009,28(02):48-49+52. DOI： 10.13873/j.1000-97872009.02.032.

LIU Xin. Research on MEMS NO₂ micro gas sensor[J]. 2009, 28(2): 48-49+52. DOI： 10.13873/j.1000-97872009.02.032.

摘要

采用MEMS技术制作了硅基微型NO2气体传感器

选用高分子金属酞菁聚合物酞菁铜作为敏感膜

从半导体理论出发解释了酞菁铜的敏感机理。阐述了该传感器的结构与工艺流程

并测试了传感器的气敏特性、温度特性、响应时间和恢复时间等敏感特性。实验结果验证了酞菁铜对NO2气体的敏感性

该传感器可以检测到10-6量级的NO2气体

且响应时间快。

Abstract

The NO2 gas sensor on silicon substrate is fabricated by microelectronic mechanical system（MEMS） technology with CuPc as the thin film.The sensitive mechanism is explained from the semiconductor theory.The configuration and technological process of the sensor are described.The sensitivity

temperature characteristic

response and recovery time are tested.Experiment results confirm with the nitrogen dioxide-sensitive mechanism of the sensor

and the MEMS sensor can respond to the 10-6 level of NO2 and has short response time.

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references

基于MEMS技术的气体传感器 [J]. 李珂,于世洁,尤政,赵嘉昊. 传感器与微系统 . 2008(11)

城市二氧化氮、悬浮颗粒物、二氧化硫健康危险度评价 [J]. 李会娟,于文博,刘永泉. 国外医学(医学地理分册) . 2007(03)

酞菁在分子材料器件方面的研究进展 [J]. 陈仕艳,刘云圻,黄学斌,邱文丰,朱道本. 自然科学进展 . 2004(02)

空穴注入型CuPc二氧化氮气体传感器研究 [J]. 王涛,蒋亚东,黄春华. 仪器仪表学报 . 2003(S2)

二氧化氮化学膜传感器 [J]. 金兴良,李伟,孙大海,庄峙厦,陈曦,王小如. 传感技术学报 . 2001(04)

微机械多晶硅薄膜热敏电阻特性研究 [J]. 胡明,杨龙,A.M.Robinson. 压电与声光 . 1999(05)

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Related Institution

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Research on MEMS NO2 micro gas sensor

DOI：10.13873/j.1000-97872009.02.032

摘要

Abstract

关键词

Keywords

references

Research on MEMS NO₂ micro gas sensor