Modeling and simulation of closed-loop detection system of MEMS gyroscope based on ∑-Δ modulator

SUN Qian; LIU Jian-ye; LI Rong-bing

doi:10.13873/j.1000-97872009.01.005

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Modeling and simulation of closed-loop detection system of MEMS gyroscope based on ∑-Δ modulator

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- Modeling and simulation of closed-loop detection system of MEMS gyroscope based on ∑-Δ modulator
- Vol. 28, Issue 1, Pages: 36-39(2009)
- 作者机构：
  
  南京航空航天大学导航研究中心
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872009.01.005
  CLC： V241.5
- Published：2009
- 稿件说明：
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[1]孙茜,刘建业,李荣冰.基于混合控制的闭环MEMS陀螺建模与仿真[J].传感器与微系统,2009,28(01):36-39.

SUN Qian, LIU Jian-ye, LI Rong-bing. Modeling and simulation of closed-loop detection system of MEMS gyroscope based on ∑-Δ modulator[J]. 2009, 28(1): 36-39.
[1]孙茜,刘建业,李荣冰.基于混合控制的闭环MEMS陀螺建模与仿真[J].传感器与微系统,2009,28(01):36-39. DOI： 10.13873/j.1000-97872009.01.005.

SUN Qian, LIU Jian-ye, LI Rong-bing. Modeling and simulation of closed-loop detection system of MEMS gyroscope based on ∑-Δ modulator[J]. 2009, 28(1): 36-39. DOI： 10.13873/j.1000-97872009.01.005.

摘要

论述了MEMS陀螺力平衡式闭环检测的基本原理

将∑-Δ调制器用于MEMS陀螺的闭环检测

设计了基于∑-Δ调制器的离散信号和基于比例积分与测速反馈的混合闭环检测反馈网络。建立了MEMS陀螺仪闭环检测系统的模型

并进行了仿真验证

本文设计的闭环MEMS陀螺相对于开环检测方式

电路噪声造成的误差减小了67.7%

零偏稳定性提高了3倍。仿真结果验证了所设计的混合闭环检测方案的有效性。

Abstract

The basic principle of force balance closed-loop detection of MEMS gyroscope is discussed.A ∑-Δ modulator is used in the closed-loop detection

and a hybrid feedback network is designed based on ∑-Δ modulator

PI controller and speed feedback.The model of closed-loop detection system of the MEMS gyroscope is constructed and simulations are carried out.The result shows that the circuit noise of the proposed closed-loop model has decreased by 67.7% and the bias stability is improved by 3 times compared with opened-loop detection.The simulations validate the hybrid closed-loop detection scheme.

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references

MEMS硅微陀螺仪系统级建模与仿真研究 [J]. 温佰仟,刘建业,李荣冰. 中国惯性技术学报 . 2007(04)

力平衡框架结构加速度计的设计 [J]. 陈伟平,赵振刚,刘晓为,韩天. 传感技术学报 . 2006(05)

基于Σ-Δ调制技术的数字反馈控制系统设计 [D]. 古玉锋. 西北工业大学 2006

自动控制原理[M]. 科学出版社 , 王万良编著, 2001

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