Surface plasmon resonance gas sensor with composite of Ag/TiO<sub>2</sub> film layer

FU Yun-liang

doi:10.13873/j.1000-97872008.12.030

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Surface plasmon resonance gas sensor with composite of Ag/TiO₂ film layer

更新时间：2025-09-11

- Surface plasmon resonance gas sensor with composite of Ag/TiO₂ film layer
- Vol. 27, Issue 12, Pages: 91-93(2008)
- 作者机构：
  
  海南师范大学物理系
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872008.12.030
  CLC： TP212
- Published：2008
- 稿件说明：
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[1]符运良.表面等离子共振Ag/TiO_2复合膜气体传感器[J].传感器与微系统,2008,27(12):91-93.

FU Yun-liang. Surface plasmon resonance gas sensor with composite of Ag/TiO₂ film layer[J]. 2008, 27(12): 91-93.
[1]符运良.表面等离子共振Ag/TiO_2复合膜气体传感器[J].传感器与微系统,2008,27(12):91-93. DOI： 10.13873/j.1000-97872008.12.030.

FU Yun-liang. Surface plasmon resonance gas sensor with composite of Ag/TiO₂ film layer[J]. 2008, 27(12): 91-93. DOI： 10.13873/j.1000-97872008.12.030.

摘要

提出一种新型的Ag/TiO2复合膜三甲胺（TMA）气敏光化学表面等离子共振（SPR）传感器结构。结构中使用一只金红石材料作成的棱镜作为耦合棱镜

在棱镜的底边采用射频溅射技术制作Ag/TiO2复合膜

Ag膜和TiO2膜的厚度分别为50 nm和100 nm

在复合膜上设置待测气体的样品池。在He-Ne光入射激励下

复合膜的分界面发生SPR现象。实验结果表明:SPR角与TMA气体的体积分数基本呈线性比例关系。

Abstract

A novel surface plasmon resonance（SPR）trimethylamine（TAM）gas sensor structure coated a combined Ag and TiO2 film is proposed.The combined film is prepared by RF-reactive-sputtering deposition on rutile prism

and the thicknesss of Ag and TiO2 films are 50nm and 100nm

respectively.A gas sample cell is set up on the surface of the combined film.The phenomena of SPR occurs on the interfue of combined film under the excitation of He-Ne light.The experiments show that the SPR angle is almost linear with the TAM volume fraction.

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references

表面等离子共振金/钯复合膜氢敏传感器 [J]. 胡建东,王晓萍,文泓桥. 光学技术 . 2004(06)

表面等离子体子共振光化学传感器用于葡萄糖溶液的测定 [J]. 戴春霞,陈泽忠. 湖南轻工业高等专科学校学报 . 2003(03)

薄膜光学与技术[M]. 机械工业出版社 , 唐晋发,顾培夫编, 1989

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Related Institution

School of Physics and Electronic Engineering,Hainan Normal University

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Surface plasmon resonance gas sensor with composite of Ag/TiO2 film layer

DOI：10.13873/j.1000-97872008.12.030

摘要

Abstract

关键词

Keywords

references

Surface plasmon resonance gas sensor with composite of Ag/TiO₂ film layer