Low input capacitance amplifier for accelerometer

TAN Xiao-yun; HUANG Gang; LIU Xiao-wei

doi:10.13873/j.1000-97872008.12.011

Chinese

您当前的位置：

首页 >

文章列表页 >

Low input capacitance amplifier for accelerometer

更新时间：2025-09-11

- Low input capacitance amplifier for accelerometer
- Vol. 27, Issue 12, Pages: 76-78(2008)
- 作者机构：
  
  哈尔滨工业大学MEMS中心
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872008.12.011
  CLC： TN722.77
- Published：2008
- 稿件说明：
移动端阅览
[1]谭晓昀,黄刚,刘晓为.一种用于微加速度计的低输入电容运算放大器[J].传感器与微系统,2008,27(12):76-78.

TAN Xiao-yun, HUANG Gang, LIU Xiao-wei. Low input capacitance amplifier for accelerometer[J]. 2008, 27(12): 76-78.
[1]谭晓昀,黄刚,刘晓为.一种用于微加速度计的低输入电容运算放大器[J].传感器与微系统,2008,27(12):76-78. DOI： 10.13873/j.1000-97872008.12.011.

TAN Xiao-yun, HUANG Gang, LIU Xiao-wei. Low input capacitance amplifier for accelerometer[J]. 2008, 27(12): 76-78. DOI： 10.13873/j.1000-97872008.12.011.

摘要

采用0.5μm CMOS工艺设计了一种低输入电容运算放大器。该运算放大器通过采用正反馈回路消除运算放大器输入管的密勒电容来实现低输入电容。分析了寄生电容对加速度计灵敏度的影响

并提出了一种采用低输入电容运算放大器的开环加速度计接口电路实现方法。结果表明:采用低输入电容运算放大器能够有效地提高加速度计灵敏度。

Abstract

A low input capacitance amplifier（LICA）is designed by using 0.5μm CMOS technology.The miller capacitor is cancelled by the positive feedback in the LICA.The influence of parasitic capacitance on sensitivity of accelerometer is analyzed

and a realization method of the interface circuit of open-loop accelerometer with LICA is presented.The simulation results demonstrate that using LICA is effective to improve the sensitivity of accelerometer.

关键词

Keywords

references

加速度传感器信号处理集成电路的研制 [J]. 蓝慕杰,刘晓为,陈伟平,刘亚春,王美,王东旺. 微纳电子技术 . 2003(Z1)

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Design and manufacture of novel microlever-enhanced MEMS accelerometer

Study on sensitivity and static stiffness of parallel six-axis acceleration sensing mechanisms

Design of electromagnetic force closed-loop feedback system for micro-grating accelerometer

Research on robust design of capacitive MEMS pressure sensor

Study on flexible capacitive pressure sensor based on microstructure design and simulation

Related Author

GENG Zhipeng

MIAO Bin

FENG Changkun

TAO Jinyan

LI Shuxian

LI Jiadong

ZHANG Yuanwei

YOU Jingjing

Related Institution

College of Mechanical Engineering，Dalian University

Suzhou Institute of Nano-Tech and Nano-Bionics Lightweight Laboratory,Chinese Academy of Sciences

Key Laboratory of Multifunctional Nanomaterials and Smart Systems,Chinese Academy of Sciences

College of Mechanical and Electrical Engineering,Nanjing Forestry University

Science and Technology on Electronic Test ＆ Measurement Laboratory,North University of China

⁰