Design and simulation of structure of micro hydrogen sensor

XU Ren-qing; YIN Chen-bo; HE Mao-xian

doi:10.13873/j.1000-97872008.11.032

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Design and simulation of structure of micro hydrogen sensor

更新时间：2025-09-11

- Design and simulation of structure of micro hydrogen sensor
- Vol. 27, Issue 11, Pages: 87-89+92(2008)
- 作者机构：
  
  南京工业大学车辆与工程机械研究所
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872008.11.032
  CLC： TP212.2
- Published：2008
- 稿件说明：
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[1]徐仁庆,殷晨波,何茂先.微型氢气传感器的结构设计与仿真分析[J].传感器与微系统,2008,27(11):87-89+92.

XU Ren-qing, YIN Chen-bo, HE Mao-xian. Design and simulation of structure of micro hydrogen sensor[J]. 2008, 27(11): 87-89+92.
[1]徐仁庆,殷晨波,何茂先.微型氢气传感器的结构设计与仿真分析[J].传感器与微系统,2008,27(11):87-89+92. DOI： 10.13873/j.1000-97872008.11.032.

XU Ren-qing, YIN Chen-bo, HE Mao-xian. Design and simulation of structure of micro hydrogen sensor[J]. 2008, 27(11): 87-89+92. DOI： 10.13873/j.1000-97872008.11.032.

摘要

基于金属氧化物半导体气体传感器的工作机理

提出了一种微型氢气传感器结构设计。针对几个主要设计参数

利用有限元分析软件ANSYS对这种结构进行了热分析。通过分析和比较

完成了对微型氢气传感器结构的优化设计

并对优化后的传感器进行了瞬态分析。分析结果表明:所设计的传感器结构符合设计要求。

Abstract

Based on the operational mechanism of the metal oxide semiconductor gas sensor

a new kind of structure design of micro hydrogen sensor is presented.Aiming at several important design parameters

the structure is simulated with thermal analysis by the finite element analysis software ANSYS.The optimization result of structure design of micro hydrogen sensor is obtained by analyzing and comparing.The optimized sensor is simulated with transient analysis.The result indicates the structure can meet the design requirement.

关键词

Keywords

references

氢能的安全性和燃料电池汽车的氢安全问题 [J]. 冯文,王淑娟,倪维斗,陈昌和. 太阳能学报 . 2003(05)

氢能及制氢的应用技术现状及发展趋势 [J]. 王艳辉,吴迪镛,迟建. 化工进展 . 2001(01)

微结构气敏传感器与电子鼻研究 [D]. 李建平. 中国科学院电子学研究所 2000

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