Research progress of SAW chemical warfare agent sensor

ZHAO Yi-gui; LIU Ming; NIU Jie-bin

doi:10.13873/j.1000-97872008.09.032

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Research progress of SAW chemical warfare agent sensor

更新时间：2025-09-11

- Research progress of SAW chemical warfare agent sensor
- Issue 9, Pages: 1-3(2008)
- 作者机构：
  
  中国科学院微电子研究所纳米加工与新器件集成技术实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872008.09.032
  CLC： TP212.2
- Published：2008
- 稿件说明：
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[1]赵以贵,刘明,牛洁斌.SAW化学战剂传感器的研究进展[J].传感器与微系统,2008(09):1-3.

ZHAO Yi-gui, LIU Ming, NIU Jie-bin. Research progress of SAW chemical warfare agent sensor[J]. 2008, (9): 1-3.
[1]赵以贵,刘明,牛洁斌.SAW化学战剂传感器的研究进展[J].传感器与微系统,2008(09):1-3. DOI： 10.13873/j.1000-97872008.09.032.

ZHAO Yi-gui, LIU Ming, NIU Jie-bin. Research progress of SAW chemical warfare agent sensor[J]. 2008, (9): 1-3. DOI： 10.13873/j.1000-97872008.09.032.

摘要

简要叙述了声表面波（SAW）化学战剂传感器的传感原理和研究进展。详细阐述了高Q低插损SAW振荡电路的设计、敏感膜材料和成膜技术的研究进展

指出了SAW化学战剂传感器发展的趋势。

Abstract

The surface acoustic wave（SAW）chemical warfare agent sensor is briefly discussed in theory and research progress.The design of high Q and low insertion loss（IL）SAW oscillator

research of chemical sensing film and process of film are detailed expatiated.The future development of SAW chemical warfare agent sensor is forecasted.

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