Preparation of MEMS-based micro direct methanol fuel cell

SUO Chun-guang; CHEN Wei-ping; LIU Xiao-wei

doi:10.13873/j.1000-97872008.09.004

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Preparation of MEMS-based micro direct methanol fuel cell

更新时间：2025-09-11

- Preparation of MEMS-based micro direct methanol fuel cell
- Issue 9, Pages: 118-120(2008)
- 作者机构：
  
  哈尔滨工业大学MEMS中心
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872008.09.004
  CLC： TM911.4
- Published：2008
- 稿件说明：
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[1]索春光,陈伟平,刘晓为.基于MEMS技术的微型直接甲醇燃料电池的制作[J].传感器与微系统,2008(09):118-120.

SUO Chun-guang, CHEN Wei-ping, LIU Xiao-wei. Preparation of MEMS-based micro direct methanol fuel cell[J]. 2008, (9): 118-120.
[1]索春光,陈伟平,刘晓为.基于MEMS技术的微型直接甲醇燃料电池的制作[J].传感器与微系统,2008(09):118-120. DOI： 10.13873/j.1000-97872008.09.004.

SUO Chun-guang, CHEN Wei-ping, LIU Xiao-wei. Preparation of MEMS-based micro direct methanol fuel cell[J]. 2008, (9): 118-120. DOI： 10.13873/j.1000-97872008.09.004.

摘要

为了进一步简化微型直接甲醇燃料电池（μDMFC）系统

便于电池批量生产

采用MEMS技术制作μDMFC。电池的制作包括传统的MEMS工艺

如

氧化、光刻、湿法刻蚀、硅—玻璃键合等方法

还包括一种新的催化电极制备方法

即采用硅片阳极氧化的方法。首先

制得多孔硅（PS）作为催化电极的基底

然后

采用化学镀法分别在PS上沉积出Pt阴极催化电极和Pt-Ru阳极催化电极。PS具有巨大的比表面积

使化学镀的催化剂层拥有不连续的三维结构

能显著增加催化剂的活性面积

同时

化学镀液中贵金属的利用率高达95%

可以有效地节约贵金属用量。研究中采用扫描电镜（SEM）

能量色散X射线分析（EDX）对催化剂层的形貌和成分等物理性能进行了分析。

Abstract

In order to further simplify the micro direct methanol fuel cell（μDMFC）systems

MEMS technology is employed to batch fabricate μDMFC.Conventional MEMS processes

such as thermal oxidation

optical lithography

wet etching and anodic bonding are included.Furthermore

a novel method of fabricating electrocatalytic electrodes is introduced.First a porous silicon（PS）layer is formed by anodic etching in a HF-ethanol solution.Then the anodic and cathodal catalyst layer are formed by using electroless plating platinum or platinum and ruthenium（Pt-Ru） co-deposition over PS substrates.Catalyst being deposited on PS brings three-dimensional features

and the non-planar interfaces for the catalytic electrodes will increase the active surface area within a stated volume.Additionally

as high as 95% the utilization ratio of noble metal in electroless plating solution leads economizing platinum and ruthenium.SEM

EDX are employed to analysis the catalyst layer.

关键词

Keywords

references

基于阴极新结构的高性能自呼吸式MEMS微型氢/空气燃料电池 [J]. 郑丹,张熙贵,张鲲,杨辉,李昕欣,夏保佳. 应用化学 . 2007(06)

一种高灵敏度硅微机械陀螺的设计与制造 [J]. 陈雪萌,宋朝晖,李欣昕,王跃林,张鲲,焦继伟,杨恒. 传感器技术 . 2004(12)

Power ME MS研究现状及展望 [J]. 甘霖,李伟,杨灿军,刘宜胜,宋瑞银,黎嘉杰. 机床与液压 . 2004(09)

MEMS微电源技术 [J]. 刘晓为,邓琴,郭猛,兰慕杰,王喜莲. 传感器技术 . 2003(07)

硅基MEMS加工技术及其标准工艺研究 [J]. 王阳元,武国英,郝一龙,张大成,肖志雄,李婷,张国炳,张锦文. 电子学报 . 2002(11)

Development of MEMS-based direct methanol fuel cell with high power density using nanoimprint technology [J] . Yi Zhang,Jian Lu,Satoshi Shimano,Haoshen Zhou,Ryutaro Maeda. Electrochemistry Communications . 2007 (6)

Effect of operation parameters on performance of micro direct methanol fuel cell fabricated on printed circuit board [J] . Sang Woo Lim,Seung Wan Kim,Hyun Jong Kim,Ji Eun Ahn,Hak Soo Han,Yong Gun Shul. Journal of Power Sources . 2006 (1)

Application of MEMS technology to micro fuel cells [J] . Yohtaro Yamazaki. Electrochimica Acta . 2004 (2)

Acid loaded porous silicon as a proton exchange membrane for micro-fuel cells [J] . Scott Gold,Kuan-Lun Chu,Chang Lu,Mark A. Shannon,Richard I. Masel. Journal of Power Sources . 2004 (1)

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