Analysis and simulation of quadrature error on MEMS gyroscope

WEN Bai-qian; LIU Jian-ye; LI Rong-bing

doi:10.13873/j.1000-97872008.09.002

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Analysis and simulation of quadrature error on MEMS gyroscope

更新时间：2025-09-11

- Analysis and simulation of quadrature error on MEMS gyroscope
- Issue 9, Pages: 82-84+88(2008)
- 作者机构：
  
  南京航空航天大学导航研究中心
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872008.09.002
  CLC： V241.5
- Published：2008
- 稿件说明：
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[1]温佰仟,刘建业,李荣冰.MEMS陀螺正交误差分析与仿真[J].传感器与微系统,2008(09):82-84+88.

WEN Bai-qian, LIU Jian-ye, LI Rong-bing. Analysis and simulation of quadrature error on MEMS gyroscope[J]. 2008, (9): 82-84+88.
[1]温佰仟,刘建业,李荣冰.MEMS陀螺正交误差分析与仿真[J].传感器与微系统,2008(09):82-84+88. DOI： 10.13873/j.1000-97872008.09.002.

WEN Bai-qian, LIU Jian-ye, LI Rong-bing. Analysis and simulation of quadrature error on MEMS gyroscope[J]. 2008, (9): 82-84+88. DOI： 10.13873/j.1000-97872008.09.002.

摘要

针对MEMS陀螺由于机械耦合引起的正交误差

建立了包含误差的MEMS陀螺动力学方程

在开环检测和闭环检测情况下

分别对正交误差进行了分析

并通过相关检测技术抑制正交误差对陀螺性能的影响

提取出角速度信息。运用Simulink对陀螺进行了建模仿真

仿真结果表明:在开环检测和闭环检测情况下都能够有效消除正交误差的影响

由此验证了理论分析的正确性。

Abstract

Aimed at quadrature error induced with mechanical coupling

the dynamic equations of MEMS gyroscopes including error are given

under the condition of open loop detection and closed loop detection quadrature error is analyzed separately.Effect of quadrature error on MEMS gyroscope performance is inhibited and the input angular rate signal is extracted by using the method of correlation detection.Simulink is used on the modeling and simulation of gyroscope

the simulation results show that the effect of quadrature error can be eliminated effectively under the condition of open loop detection and closed loop detection.Hence

the validity of the theoretical analysis is verified.

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references

硅微陀螺仪的误差分析 [J]. 施芹,裘安萍,苏岩,朱欣华. 传感技术学报 . 2006(05)

基于MEMS技术的微型惯性导航系统的发展现状 [J]. 李荣冰,刘建业,曾庆化,华冰. 中国惯性技术学报 . 2004(06)

微石英音叉陀螺角速度信号提取方法的研究 [J]. 王莹,孙雨南,秦秉坤,崔芳. 北京理工大学学报 . 2003(02)

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