Considering the influence of electrostatic force edge effect

a model is established to analyze the static deformation of a micro-cantilever with large deflection

and the control equations are changed to first order nonlinear differential equations about the beam bending theory.A semi-analytical semi-numerical method is presented for analyzing micro-cantilever deformation by means of the high precision iterative refinement extended homogeneous capacity integration method

nonlinear equations solution and incremental iterative algorithm.Numerical calculated results show that the method has upper precision and stability

which is an effective method to analyze the deformation of a micro-cantilever.Static characteristics show that the pull-in voltage decreases when edge effects are considered

and the pull-in voltage increases when the influence of large deflection is considered.