Research on random drift time series modeling for comb-drive tuning fork MEMS gyroscope

QU Guo-fu; LIU Hong-zhao

doi:10.13873/j.1000-97872008.06.003

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Research on random drift time series modeling for comb-drive tuning fork MEMS gyroscope

更新时间：2025-09-11

- Research on random drift time series modeling for comb-drive tuning fork MEMS gyroscope
- Issue 6, Pages: 21-23(2008)
- 作者机构：
  
  西安理工大学机械与精密仪器工程学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872008.06.003
  CLC： V241.59
- Published：2008
- 稿件说明：
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[1]曲国福,刘宏昭.梳状音叉MEMS陀螺漂移时间序列建模方法研究[J].传感器与微系统,2008(06):21-23.

QU Guo-fu, LIU Hong-zhao. Research on random drift time series modeling for comb-drive tuning fork MEMS gyroscope[J]. 2008, (6): 21-23.
[1]曲国福,刘宏昭.梳状音叉MEMS陀螺漂移时间序列建模方法研究[J].传感器与微系统,2008(06):21-23. DOI： 10.13873/j.1000-97872008.06.003.

QU Guo-fu, LIU Hong-zhao. Research on random drift time series modeling for comb-drive tuning fork MEMS gyroscope[J]. 2008, (6): 21-23. DOI： 10.13873/j.1000-97872008.06.003.

摘要

根据一种典型结构的梳状音叉MEMS陀螺的非随机性误差特性

借助ARIMA模型对其进行描述。在ARIMA模型参数估计的过程中

引入虚拟白噪声来补偿参数估计过程中的由于噪声未知而引入的误差

根据样本的自相关函数、偏相关函数

并结合AIC与BIC准则确定模型阶数

利用最大似然估计对模型参数进行估计

在一定近似条件下

得到梳状音叉MEMS陀螺非随机性误差模型的形式。实验结果表明:采用该方法所确定的模型能够精确地描述MEMS陀螺的漂移特性

预测陀螺的输出。

Abstract

Based on the ARIMA model

the non-stochastic error feature of the comb-drive tuning fork MEMS gyroscope is studied.In the process of the estimating of the parameters of the model

the pseudo white noise is introduced to compensate the error by the unknown error.The order of the ARIMA model is determined according to the combining with autocorrelation function

the partial autocorrelation function and both AIC rules and BIC rules.The maximum likelihood function is employed to estimate the parameters of the model.On the approximate condition

the error model of the comb-drive tuning fork MEMS gyroscope is found

and the experimental results demonstrate that the model can accurately describe the drift feature and predict the output of the MEMS gyroscope respectively.

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Keywords

references

MEMS陀螺仪短时漂移特性实验研究 [J]. 张海鹏,房建成. 中国惯性技术学报 . 2007(01)

梳状音叉MEMS陀螺非随机误差分析 [J]. 李荣冰,刘建业,林雪原,华冰,刘瑞华. 电子科技大学学报 . 2006(06)

GPS组合导航系统的数据融合 [J]. 郑利龙,曹志刚. 电子学报 . 2002(09)

振动轮式MEMS陀螺动力学分析 [J]. 刘瑞华,刘建业. 宇航学报 . 2001(06)

基于滑膜阻尼效应的音叉式微机械陀螺研究 [D]. 陈永. 中国科学院研究生院（上海微系统与信息技术研究所） 2004

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