Study on electrical test method of mode frequency for capacitive MEMS devices

HOU Zhan-qiang; XIAO Ding-bang; JIANG Ping; WU Xue-zhong

doi:10.13873/j.1000-97872008.05.015

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Study on electrical test method of mode frequency for capacitive MEMS devices

更新时间：2025-09-11

- Study on electrical test method of mode frequency for capacitive MEMS devices
- Issue 5, Pages: 12-14(2008)
- 作者机构：
  
  国防科技大学机电工程与自动化学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872008.05.015
  CLC： TP212
- Published：2008
- 稿件说明：
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[1]侯占强,肖定邦,江平,吴学忠.电容式MEMS器件模态频率的电学测试方法研究[J].传感器与微系统,2008(05):12-14.

HOU Zhan-qiang, XIAO Ding-bang, JIANG Ping, et al. Study on electrical test method of mode frequency for capacitive MEMS devices[J]. 2008, (5): 12-14.
[1]侯占强,肖定邦,江平,吴学忠.电容式MEMS器件模态频率的电学测试方法研究[J].传感器与微系统,2008(05):12-14. DOI： 10.13873/j.1000-97872008.05.015.

HOU Zhan-qiang, XIAO Ding-bang, JIANG Ping, et al. Study on electrical test method of mode frequency for capacitive MEMS devices[J]. 2008, (5): 12-14. DOI： 10.13873/j.1000-97872008.05.015.

摘要

针对电容式MEMS器件

提出了一种基于调制解调原理的模态频率测试方法

详细介绍了该测试方法的测试原理和测试系统的组成。利用Ansys对某插齿式微加速度计进行了模态仿真分析

分析得到的模态频率为3 941 Hz

利用该测试方法对该微加速度计进行模态频率测试

得到的测试结果为3 440Hz。仿真与测试得到的结果接近

验证了该测试方法的有效性

产生偏差的主要原因可能是制造过程中的加工误差。

Abstract

A mode frequency test method for the MEMS capacitive devices is put forward based on modulation and demodulation.The test theory and the constitution of the test system are introduced.The simulated mode frequency of a comb microaccelerometer by Ansys is 3941Hz

and the measured mode frequency of this microaccelerometer by the test system is 3440Hz

which is very close to the simulated result.So it can be concluded that the mode frequency test system works very well

and the difference between the simulated result and the measured result is mainly due to the fabrication imperfection.

关键词

Keywords

references

电容式微加速度计的闭环检测技术研究 [J]. 吴学忠,肖定邦,李圣怡. 传感技术学报 . 2006(04)

电容式微机械陀螺设计[M]. 国防工业出版社 , 李锦明, 2006

微惯性技术[M]. 电子工业出版社 , 刘俊,石云波,李杰编著, 2005

模态分析技术[M]. 清华大学出版社 , 管迪华编著, 1996

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