Development of novel composite structural electro-thermal actuator

ZENG Wen-guang; DING Gui-fu; WANG Yan; FU Shi; CAI Yu-li

doi:10.13873/j.1000-97872008.05.007

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Development of novel composite structural electro-thermal actuator

更新时间：2025-09-11

- Development of novel composite structural electro-thermal actuator
- Issue 5, Pages: 117-120(2008)
- 作者机构：
  
  上海交通大学微米/纳米加工技术国家重点实验室薄膜与微细技术教育部重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872008.05.007
  CLC： TH703
- Published：2008
- 稿件说明：
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[1]曾文光,丁桂甫,王艳,付世,蔡玉丽.新型复合结构电热微驱动器的研制[J].传感器与微系统,2008(05):117-120.

ZENG Wen-guang, DING Gui-fu, WANG Yan, et al. Development of novel composite structural electro-thermal actuator[J]. 2008, (5): 117-120.
[1]曾文光,丁桂甫,王艳,付世,蔡玉丽.新型复合结构电热微驱动器的研制[J].传感器与微系统,2008(05):117-120. DOI： 10.13873/j.1000-97872008.05.007.

ZENG Wen-guang, DING Gui-fu, WANG Yan, et al. Development of novel composite structural electro-thermal actuator[J]. 2008, (5): 117-120. DOI： 10.13873/j.1000-97872008.05.007.

摘要

在弯曲梁电热微驱动器原理的基础上

通过引入热膨胀系数更大的聚合物

提出了一种新型复合结构电热微驱动器。采用了ANSYS有限元分析软件

对其基本结构形式进行了系统的仿真分析

得到了一组初步优化的器件结构参数。仿真结果表明:新型电热微驱动器有更低的能耗和更大的位移。采用非硅表面微加工技术

成功制备了新型复合结构电热微驱动器。

Abstract

Based on the bent-beam electro-thermal actuator principle

polymer with large CTE is adopted and a novel composite structural electro-thermal actuator is prompted.Applying commercial FE software package（ANSYS）

its basic structure is systematically analysed and adequate manufacturing parameters are got.Simulation results show that this novel electro-thermal actuator has lower energy-consumption and larger displacement than the original bent-beam electro-thermal actuator.A novel composite structural electro-thermal actuator is fabricated by non-silicon surface machining.

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references

用于MEMS的叠层光刻胶牺牲层技术（英文） [J]. 张永华,丁桂甫,姜政,蔡炳初,赖宗声. 传感技术学报 . 2006(05)

Removal of SU-8 photoresist for thick film applications [J] . Paul M. Dentinger,W.Miles Clift,Steven H. Goods. Microelectronic Engineering . 2002

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