Dynamic analysis of capacitive micromechanical silicon gyroscope with three frames

GUO Hui-fang1; LI Jin-ming1; LIU Jun1

doi:10.13873/j.1000-97872008.05.002

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Dynamic analysis of capacitive micromechanical silicon gyroscope with three frames

更新时间：2025-09-11

- Dynamic analysis of capacitive micromechanical silicon gyroscope with three frames
- Issue 5, Pages: 24-26(2008)
- 作者机构：
  
  中北大学仪器科学与动态测试教育部重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872008.05.002
  CLC： V241.5
- Published：2008
- 稿件说明：
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[1]郭慧芳,李锦明,刘俊.三框架电容式硅微机械陀螺动力学分析[J].传感器与微系统,2008(05):24-26.

GUO Hui-fang1, LI Jin-ming1, LIU Jun1. Dynamic analysis of capacitive micromechanical silicon gyroscope with three frames[J]. 2008, (5): 24-26.
[1]郭慧芳,李锦明,刘俊.三框架电容式硅微机械陀螺动力学分析[J].传感器与微系统,2008(05):24-26. DOI： 10.13873/j.1000-97872008.05.002.

GUO Hui-fang1, LI Jin-ming1, LIU Jun1. Dynamic analysis of capacitive micromechanical silicon gyroscope with three frames[J]. 2008, (5): 24-26. DOI： 10.13873/j.1000-97872008.05.002.

摘要

为了解决双框架陀螺在加工中不可避免的误差

提出了三框架电容式微机械陀螺系统。该系统由3个框架（即3个质量块）组成。采用静电差分驱动方式

梳状叉指电容

多个柔性杆设计使得该结构从理论分析和加工误差上解决了耦合现象。同时

通过提高中间框架的质量

使得陀螺的灵敏度大大提高。介绍了该三框架电容式微机械陀螺仪的工作原理

给出了所设计陀螺动力学方程的详尽推导和MAT-LAB仿真分析。

Abstract

In order to solve the inevitable error in the machining of silicon micromechanical gyroscope with double frames

the system of capacitive micromechanical gyroscope with three frames is put forward.With static electronic differential driving

comb-finger capacitance

more flexible poles

the gyroscope solves the coupling from theory analysis and processing error.The sensitivity of gyroscope is improved by improving the mass of middle frame.The principle of the gyroscope is presented.Detailed dynamic equation and MATLAB simulation a analysis are also presented.

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references

梳齿式微机械陀螺支撑系统的结构仿真与分析 [J]. 李林,李锦明,张文栋. 传感技术学报 . 2006(04)

体硅微机械陀螺的设计与模拟 [J]. 霍明学,陈伟平,曹一江,陈强,刘晓为,张丹. 哈尔滨工业大学学报 . 2005(09)

硅微机械谐振式陀螺仪 [J]. 朱一纶,王寿荣,裘安萍. 中国惯性技术学报 . 2003(04)

双输入轴微机械陀螺仪的研究与进展 [J]. 李宏生. 中国惯性技术学报 . 2002(06)

微型双框架角振动陀螺仪的原理及结构误差分析 [J]. 蔡体菁,裘安萍,周百令. 东南大学学报 . 1999(03)

电容式微机械陀螺设计[M]. 国防工业出版社 , 李锦明, 2006

微惯性技术[M]. 电子工业出版社 , 刘俊,石云波,李杰编著, 2005

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