Finite element analysis and experiment for micro-displacement stage of scanning tunneling microscope

KWON Chol-ho1; LIN Yu-chi1; TONG Ling-zhi1; KIM Il-guang2; ZHAO Mei-rong1

doi:10.13873/j.1000-97872008.04.008

Chinese

您当前的位置：

首页 >

文章列表页 >

Finite element analysis and experiment for micro-displacement stage of scanning tunneling microscope

更新时间：2025-09-11

- Finite element analysis and experiment for micro-displacement stage of scanning tunneling microscope
- Issue 4, Pages: 74-76+79(2008)
- 作者机构：
  
  1. 天津大学精密测试技术及仪器国家重点试验室
  2. 金日成综合大学物理学院
  3. 天津大学精密测试技术及仪器国家重点试验室,天津,300072
  4. ,平壤,朝鲜
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872008.04.008
  CLC： TH742
- Published：2008
- 稿件说明：
移动端阅览
[1]权哲浩,林玉池,仝凌志,金日光,赵美蓉.扫描隧道显微镜微动台的有限元分析与实验研究[J].传感器与微系统,2008(04):74-76+79.

KWON Chol-ho1, LIN Yu-chi1, TONG Ling-zhi1, et al. Finite element analysis and experiment for micro-displacement stage of scanning tunneling microscope[J]. 2008, (4): 74-76+79.
[1]权哲浩,林玉池,仝凌志,金日光,赵美蓉.扫描隧道显微镜微动台的有限元分析与实验研究[J].传感器与微系统,2008(04):74-76+79. DOI： 10.13873/j.1000-97872008.04.008.

KWON Chol-ho1, LIN Yu-chi1, TONG Ling-zhi1, et al. Finite element analysis and experiment for micro-displacement stage of scanning tunneling microscope[J]. 2008, (4): 74-76+79. DOI： 10.13873/j.1000-97872008.04.008.

摘要

设计了一种以基于尺蠖运动原理的微动台为核心的扫描隧道显微镜（STM）机械机构

利用有限元方法对微动台部分的结构进行分析

对其静态、模态特性进行了实验研究。结果表明:微动台具有较大的行程和较好的稳定性

载物力可以达到16.7 N

最小步距约8.8 nm

行程14mm。

Abstract

A novel micro-displacement stage of scanning tunneling microscopy（STM） based on the principle of inchworm motion is designed.it is successful in observing atom space image.By using the finite element analysis software

research is done on the static and dynamic character of the micro-displacement stage.The experiment results show that the motion of the micro-displacement stage is stability

loading capacity is 16.7N and the mini-real step is 8.8nm

the moving range is 14mm.

关键词

Keywords

references

压电直线精密驱动器研究 [J]. 刘建芳,杨志刚,范尊强,程光明. 光学精密工程 . 2005(01)

基于STM的纳米测试技术及其在机械领域中的应用 [J]. 张振宇,李鸿琦,周红秀. 制造技术与机床 . 2004(08)

基于PZT的微驱动定位系统及控制方法的研究 [J]. 孙立宁,孙绍云,曲东升,蔡鹤皋. 光学精密工程 . 2004(01)

微纳定位/进给技术研究现状 [J]. 嵇国金,马奎,王磊. 微纳电子技术 . 2003(05)

Analytical model of displacement amplification and stiffness optimization for a class of flexure-based compliant mechanisms [J] . Nicolae Lobontiu,Ephrahim Garcia. Computers and Structures . 2003 (32)

Views

125

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Study on characteristic of long-travel piezoelectric micro-positioner

Micro-deformation measuring system of materials based on piezoelectric ceramic

Design of asymmetric microgripper with large displacement piezoelectric-driven based on flexible mechanism

Research on energy harvesting by piezoelectric polymer thin films with large deflection

Experimental study on interface damage monitoring of prefabricated concrete structure based on nano-materials

Related Author

KWON Chol-ho1

LIN Yu-chi1

ZHAO Mei-rong1

RI Kwang-son2

QI Yong-yue1

ZHU Yue

LI Junhui

YU Huizhen

Related Institution

School of Physics,KIM IL SUNG University,D.P.R.

College of Information Science and Technology, Nanjing Forestry University

School of Electronic Information Engineering, Henan Institute of Technology

College of Mechanical & Electrical Engineering,Qingdao University

Shaoxing Station of Traffic Engineering Quality and Safety Supervision

⁰