Study on characteristic of long-travel piezoelectric micro-positioner

KWON Chol-ho1; LIN Yu-chi1; ZHAO Mei-rong1; RI Kwang-son2; QI Yong-yue1

doi:10.13873/j.1000-97872008.02.009

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Study on characteristic of long-travel piezoelectric micro-positioner

更新时间：2025-09-11

- Study on characteristic of long-travel piezoelectric micro-positioner
- Issue 2, Pages: 39-41+45(2008)
- 作者机构：
  
  1. 天津大学精密测试技术及仪器国家重点试验室
  2. 金日成综合大学物理学院
  3. 天津大学精密测试技术及仪器国家重点试验室,天津,300072
  4. ,朝鲜
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872008.02.009
  CLC： TH822
- Published：2008
- 稿件说明：
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[1]权哲浩,林玉池,赵美蓉,李光鲜,齐永岳.大行程纳米级步进压电微动台的特性研究[J].传感器与微系统,2008(02):39-41+45.

KWON Chol-ho1, LIN Yu-chi1, ZHAO Mei-rong1, et al. Study on characteristic of long-travel piezoelectric micro-positioner[J]. 2008, (2): 39-41+45.
[1]权哲浩,林玉池,赵美蓉,李光鲜,齐永岳.大行程纳米级步进压电微动台的特性研究[J].传感器与微系统,2008(02):39-41+45. DOI： 10.13873/j.1000-97872008.02.009.

KWON Chol-ho1, LIN Yu-chi1, ZHAO Mei-rong1, et al. Study on characteristic of long-travel piezoelectric micro-positioner[J]. 2008, (2): 39-41+45. DOI： 10.13873/j.1000-97872008.02.009.

摘要

运用有限元分析方法

建立纳米级步进压电微动台的实体模型并进行了仿真计算

考察了结构参数对步进型压电微动台性能的影响

得到了压电微动台的固有频率和振型。采用正交实验法设计结构参数

分析了不同因素对压电微动台的固有频率和振动幅值的影响

得到了影响二者之比的4个因素的最优设计参数。根据逐步回归分析的方法建立了结构设计参数的数学模型

从而定量地分析各自变量与一阶固有频率之间的关系。

Abstract

By using the finite element analysis software

a nano-stepper piezoelectric micro-positioner with long-range is established and simulated.Influence of structural parameters on the stepper piezoelectric micro-positioner is investigated and its natural frequencies and mode shapes are analyzed.The orthogonal experiment methods are used to arrange the test structure design parameters and optimizing design parameters of the configuration of the device are gained.A mathematical model using stepwise regression is built to quantitatively analyze the influence of parameters of stepper piezoelectric micro-positioner.

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references

大行程纳米级步距压电电动机 [J]. 赵美蓉,温丽梅,林玉池,张玉祥. 机械工程学报 . 2004(08)

单自由度微位移机构柔性铰链的研究 [J]. 沈健,朱仁胜,赵韩. 上海交通大学学报 . 2004(06)

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