Investigation on capacitive humidity sensing properties of WO<sub>3</sub>/Si-NPA composite thin film

FENG Chun-yue1; XIAO Long2; DONG Yong-fen1; LI Xin-jian1

doi:10.13873/j.1000-97872007.11.026

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Investigation on capacitive humidity sensing properties of WO₃/Si-NPA composite thin film

更新时间：2025-09-11

- Investigation on capacitive humidity sensing properties of WO₃/Si-NPA composite thin film
- Issue 11, Pages: 57-60+64(2007)
- 作者机构：
  
  1. 郑州大学物理系材料物理教育部重点实验室
  2. 河南职业技术学院机械电子工程系
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872007.11.026
  CLC： TP212
- Published：2007
- 稿件说明：
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[1]冯春岳,肖龙,董永芬,李新建.WO_3/Si-NPA复合薄膜的电容湿度传感性能研究[J].传感器与微系统,2007(11):57-60+64.

FENG Chun-yue1, XIAO Long2, DONG Yong-fen1, et al. Investigation on capacitive humidity sensing properties of WO₃/Si-NPA composite thin film[J]. 2007, (11): 57-60+64.
[1]冯春岳,肖龙,董永芬,李新建.WO_3/Si-NPA复合薄膜的电容湿度传感性能研究[J].传感器与微系统,2007(11):57-60+64. DOI： 10.13873/j.1000-97872007.11.026.

FENG Chun-yue1, XIAO Long2, DONG Yong-fen1, et al. Investigation on capacitive humidity sensing properties of WO₃/Si-NPA composite thin film[J]. 2007, (11): 57-60+64. DOI： 10.13873/j.1000-97872007.11.026.

摘要

制备了基于硅纳米孔柱阵列（Si-NPA）的WO3/Si-NPA复合薄膜

并对其表面形貌进行了表征

研究了其电容湿度传感性能和基点电容的温度漂移。研究表明:WO3/Si-NPA继承了衬底Si-NPA规则的阵列结构的表面形貌特征

WO3的沉积形成了连续的WO3薄膜

WO3/Si-NPA是一种典型的纳米复合薄膜。室温下

WO3/Si-NPA的电容值随测试频率的增加而单调减小

但其灵敏度则在100 Hz时达到最大值。在此测试频率下

当环境的相对湿度从11%RH增加到95%RH时

元件的电容增量高达16 000%

显示WO3/Si-NPA对环境湿度有较高的灵敏度。同时

电容的湿度响应曲线显示出很好的线性。对其基点电容的温度稳定性研究表明:WO3/Si-NPA用作湿度传感的最佳工作温度区为15

0℃。

Abstract

The composite thin film of WO3/silicon nanoporous pillar array（Si-NPA）is prepared and its surface morphology is characterized.The capacitive humidity sensing properties and the capacitance temperature drift of WO3/Si-NPA are studied.It is shown that WO3/Si-NPA inherites the regular pillar array

the morphological characteristic of Si-NPA substrate

and a continuous WO3 thin film is formed to make WO3/Si-NPA a typical nanocomposite thin film.Measured at room temperature

the capacitance of WO3/Si-NPA decreases monotonically with the testing frequency

but a maximum sensitivity is achieved at the testing frequency of 1

00 Hz.When the relative humidity changes from 11 %RH to 95 %RH

a capacitance increment is over 16 000 % is achieved.This indicates that WO3/Si-NPA is very sensitive to humidity.Furthermore

the capacitance response of WO3/Si-NPA to humidity exhibits high linearity.The research on the capacitance-temperature dependence shows that the best operation temperature zone is 15

0 ℃.

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references

高温下Gd 2 （WO 4 ） 3 陶瓷电学行为的研究 [J]. 董亮,王豫,羊新胜. 稀有金属材料与工程 . 2005(12)

硅纳米孔柱阵列的结构和光学特性研究 [J]. 许海军,富笑男,孙新瑞,李新建. 物理学报 . 2005(05)

Influence of water on the electrochemical properties of （CeO 2 ） x （TiO 2 ） 1? x and WO 3 sol–gel coatings and electrochromic devices [J] . D.L Sun,S Heusing,J Puetz,M.A Aegerter. Solid State Ionics . 2003 (1)

Electrochromic performance of sol-gel deposited WO 3 –V 2 O 5 films [J] . N Ozer,C.M Lampert. Thin Solid Films . 1999 (1)

Microstructural effects in WO 3 gas-sensing films [J] . M.D. Antonik,J.E. Schneider,E.L. Wittman,K. Snow,J.F. Vetelino,R.J. Lad. Thin Solid Films . 1995 (1)

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Related Author

CHEN Shao-jun

YANG Guang

FENG Chun-yue

LI Xin-jian

Related Institution

Key Laboratory of Materials Physics,Ministry of Education,Department of Physics,Zhengzhou University

郑州大学物理系材料物理教育部重点实验室

⁰

Investigation on capacitive humidity sensing properties of WO3/Si-NPA composite thin film

DOI：10.13873/j.1000-97872007.11.026

摘要

Abstract

关键词

Keywords

references

Investigation on capacitive humidity sensing properties of WO₃/Si-NPA composite thin film