Study on electrostatic self-excited driving for tuning fork micromachined gyroscope with large Q value

WANG Jun-jie; CHE Lu-feng; LI Yu-fang; XIONG Bin; XIE Zheng; WANG Yue-lin

doi:10.13873/j.1000-97872007.10.020

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Study on electrostatic self-excited driving for tuning fork micromachined gyroscope with large Q value

更新时间：2025-09-11

- Study on electrostatic self-excited driving for tuning fork micromachined gyroscope with large Q value
- Issue 10, Pages: 38-40(2007)
- 作者机构：
  
  1. 中国科学院上海微系统与信息技术研究所传感技术国家重点实验室
  2. 中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海,200050
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872007.10.020
  CLC： TP274
- Published：2007
- 稿件说明：
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[1]王俊杰,车录锋,李玉芳,熊斌,谢铮,王跃林.高Q值音叉式微陀螺静电自激驱动研究[J].传感器与微系统,2007(10):38-40.

WANG Jun-jie, CHE Lu-feng, LI Yu-fang, et al. Study on electrostatic self-excited driving for tuning fork micromachined gyroscope with large Q value[J]. 2007, (10): 38-40.
[1]王俊杰,车录锋,李玉芳,熊斌,谢铮,王跃林.高Q值音叉式微陀螺静电自激驱动研究[J].传感器与微系统,2007(10):38-40. DOI： 10.13873/j.1000-97872007.10.020.

WANG Jun-jie, CHE Lu-feng, LI Yu-fang, et al. Study on electrostatic self-excited driving for tuning fork micromachined gyroscope with large Q value[J]. 2007, (10): 38-40. DOI： 10.13873/j.1000-97872007.10.020.

摘要

为了提高检测精度

对研制的具有滑膜阻尼的音叉式微机械陀螺采用静电自激驱动方式

它能够使驱动振动自动稳定在驱动模态的固有频率上

并保持恒定的驱动振动速度幅度。分析了静电自激驱动电路工作原理

采用自动增益控制（AGC）设计制作了相应的检测电路

实现了Q值为325、谐振频率为2.04 kHz微陀螺的闭环恒幅自激振动。

Abstract

In order to improve detection precision

electrostatic self-excited driving mode is presented for tuning fork micromachined gyroscope fabricated with slide-film damping

which enables driving motion to oscillate stably with natural frequency of driving mode and keep steady amplitude of driving oscillation’s velocity.The principle of electrostatic self-excited driving is analyzed

related detecting circuits is designed and fabricated by automatic gain control（AGC）and closed-loop self-excited driving is performed for the gyroscope with the Q value of 325 and resonance frequency of 2.04 kHz.

关键词

Keywords

references

基于滑膜阻尼效应的音叉式微机械陀螺研究 [D]. 陈永. 中国科学院研究生院（上海微系统与信息技术研究所） 2004

电容式振动微机械陀螺接口电路的设计、模拟与测试 [D]. 黄小振. 中国科学院上海冶金研究所 2001

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