Research on laser collimator based on interference fringe

FU Lu-hua; LIN Yu-chi; ZHOU Xin; QI Yong-yue

doi:10.13873/j.1000-97872007.09.014

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Research on laser collimator based on interference fringe

更新时间：2025-09-11

- Research on laser collimator based on interference fringe
- Issue 9, Pages: 64-66(2007)
- 作者机构：
  
  1. 天津大学精密测试技术与仪器国家重点实验室
  2. 天津大学精密测试技术与仪器国家重点实验室,天津,300072
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872007.09.014
  CLC： TN249
- Published：2007
- 稿件说明：
移动端阅览
[1]付鲁华,林玉池,周欣,齐永岳.基于干涉条纹的激光准直仪的研究[J].传感器与微系统,2007(09):64-66.

FU Lu-hua, LIN Yu-chi, ZHOU Xin, et al. Research on laser collimator based on interference fringe[J]. 2007, (9): 64-66.
[1]付鲁华,林玉池,周欣,齐永岳.基于干涉条纹的激光准直仪的研究[J].传感器与微系统,2007(09):64-66. DOI： 10.13873/j.1000-97872007.09.014.

FU Lu-hua, LIN Yu-chi, ZHOU Xin, et al. Research on laser collimator based on interference fringe[J]. 2007, (9): 64-66. DOI： 10.13873/j.1000-97872007.09.014.

摘要

在所研究的直线度激光测量系统中

以激光干涉光作为准直测量的基准

CCD作为光电转换元件

进行导轨直线度误差的测量与计算。通过系统的重复性实验以及与光电自准直仪的比对实验表明:测量系统的测量距离可达10m以上

可检测x轴方向上30 mm以内的位移变化量

分辩力可达0.001 mm。其性能指标基本达到了预定目标。

Abstract

A laser collimator to measure the straightness is provided.In this straightness measurement system

the laser interference beam is used as the measuring basis

and the linear CCD is fixed on the receiving target to get the straightness error.Through the comparison tests

system stability and reiteration test of the model instrument in contrast to photo-electricity autocollimator

the results show that the measurement length is more than 10 m

the measurement range on x direction is about 30 mm and the resolution is 0.001 mm.The performances of laser collimator can meet the scheduled goal.

关键词

Keywords

references

半导体激光器的光学准直 [J]. 李贤,周宇,曾广荣. 电子科技大学学报 . 1998(05)

图像传感器应用技术[M]. 电子工业出版社 , 王庆有主编, 2003

激光测量技术[M]. 天津大学出版社 , 孙长库,叶声华编著, 2001

激光基准高精度测量技术[M]. 国防工业出版社 , 万德安编著, 1999

几何量测量技术简明教程[M]. 机械工业出版社 , 罗南星主编, 1993

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