Finite element analysis of ZnO piezoelectric thin film acoustic sensor

ZENG Xiong; DU Xiao-song; XIE Guang-zhong; JIANG Ya-dong; LI Chongyang

doi:10.13873/j.1000-97872007.08.010

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Finite element analysis of ZnO piezoelectric thin film acoustic sensor

更新时间：2025-09-11

- Finite element analysis of ZnO piezoelectric thin film acoustic sensor
- Issue 8, Pages: 14-15+19(2007)
- 作者机构：
  
  1. 电子科技大学电子薄膜与集成器件国家重点实验室
  2. 电子科技大学电子薄膜与集成器件国家重点实验室,四川,成都,610054
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872007.08.010
  CLC： TP212.1
- Published：2007
- 稿件说明：
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[1]曾雄,杜晓松,谢光忠,蒋亚东,李重阳.ZnO压电薄膜声传感器的有限元分析[J].传感器与微系统,2007(08):14-15+19.

ZENG Xiong, DU Xiao-song, XIE Guang-zhong, et al. Finite element analysis of ZnO piezoelectric thin film acoustic sensor[J]. 2007, (8): 14-15+19.
[1]曾雄,杜晓松,谢光忠,蒋亚东,李重阳.ZnO压电薄膜声传感器的有限元分析[J].传感器与微系统,2007(08):14-15+19. DOI： 10.13873/j.1000-97872007.08.010.

ZENG Xiong, DU Xiao-song, XIE Guang-zhong, et al. Finite element analysis of ZnO piezoelectric thin film acoustic sensor[J]. 2007, (8): 14-15+19. DOI： 10.13873/j.1000-97872007.08.010.

摘要

阐述了ZnO压电薄膜声传感器的结构和工作原理

并用ANSYS 9.0对压电薄膜声传感器进行了静态分析、模态分析和谐响应分析。通过静态分析

得到压电薄膜声传感器的灵敏度为16.4 mV/Pa;模态分析得出了传感器的第一阶固有频率为12.379 kHz;谐响应分析则获得感应电压与动态外力频率之间的关系。这些分析为此类声传感器的设计提供了理论依据。

Abstract

The principle and the corresponding structures of the ZnO piezoelectric thin film acoustic sensor are presented.The static

modal and harmonic analyses of the piezoelectric thin film acoustic sensor are carried out by using software ANSYS 9.0.The sensitivity of the piezoelectric thin film acoustic sensor is 16.4 mV/Pa by the static analysis.The first-order inherent frequency of the sensor is 12.379 kHz by modal analysis.The relationship between inducted voltage and dynamic pressure frequency is deduced by harmonic analysis.All these analyses are helpful to design such acoustic sensor in theory.

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references

Ansys在PZT压电薄膜微传感器压电分析中的应用 [J]. 娄利飞,杨银堂,张军琴,李跃进. 机械科学与技术 . 2005(07)

压电微传声器的有限元分析 [J]. 杨轶,张林涛,任天令,刘理天. 仪器仪表学报 . 2003(S2)

ANSYS有限元件分析实例导航[M]. 中国铁道出版社 , 邵蕴秋, 2004

最新经典ANSYS及Workbench教程[M]. 电子工业出版社 , 小飒工作室编, 2004

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